XPS study of thin films of binary metal oxides for gas sensing applications (Contributo in atti di convegno)

Type

• Contributo in atti di convegno (Classe)
• Prodotto della ricerca (Classe)

Label

• XPS study of thin films of binary metal oxides for gas sensing applications (Contributo in atti di convegno) (literal)

Anno

• 2004-01-01T00:00:00+01:00 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi

• 10.1142/9789812702944_0038 (literal)

Alternative label

• S. Kaciulis, A. Mezzi, L. Pandolfi (2004)
  XPS study of thin films of binary metal oxides for gas sensing applications
  in 8th Italian Conference on Sensors and Microsystems, Trento, FEB 12-14, 2003
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• S. Kaciulis, A. Mezzi, L. Pandolfi (literal)

Pagina inizio

• 244 (literal)

Pagina fine

• 249 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#titoloVolume

• SENSORS AND MICROSYSTEMS (literal)

Note

• ISI Web of Science (WOS) (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• CNR, Ist Studio Mat Nanostrutturati, I-00016 Monterotondo, RM, Italy (literal)

Titolo

• XPS study of thin films of binary metal oxides for gas sensing applications (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#isbn

• 981-238-747-1 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#curatoriVolume

• Di Natale C., D'Amico A., Soncini G., Ferrario L., Zen M. (literal)

Abstract

• The chemical composition of the thin films of mixed metal oxides (Sn-W, Mo-Sn and Mo-Ti), prepared by magnetron sputtering and by sol-gel, were investigated by standard and angle-resolved XPS depth profiling techniques. Starting from the stoichiometric compounds on the surface and going deeper into the volume of the films, the depth profiles revealed there the presence of reduced metal ions. The possible contribution of sputtering-induced reduction of the oxides, interchange redox reactions between two metal ions in these compounds, influence of sputtering ion energy and photoelectron collection angle are discussed on the basis of obtained experimental results. (literal)

Editore

• World Scientific Publishing Co. Pte. Ltd. (Editore)

Prodotto di

• Istituto per lo studio dei materiali nanostrutturati (ISMN) (Istituto)

Autore CNR

• ALESSIO MEZZI (Unità di personale interno)
• SAULIUS KACIULIS (Persona)

Incoming links:

Prodotto

• Istituto per lo studio dei materiali nanostrutturati (ISMN) (Istituto)

Autore CNR di

• SAULIUS KACIULIS (Persona)
• ALESSIO MEZZI (Unità di personale interno)

Editore di

• World Scientific Publishing Co. Pte. Ltd. (Editore)