http://www.cnr.it/ontology/cnr/individuo/insiemeDiParoleChiave/58677

Parole chiave di "Deep X-ray Lithography for Direct Patterning of PECVD Films"

Label

Parole chiave di "Deep X-ray Lithography for Direct Patterning of PECVD Films" (literal)
Keywords of "Deep X-ray Lithography for Direct Patterning of PECVD Films" (literal)

Insieme di parole chiave di

Deep X-ray Lithography for Direct Patterning of PECVD Films (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)

Ha membro

deep X-ray lithography; infrared absorption spectroscopy (IR-AS); lithography; plasma-enhanced chemical vapour deposition (PECVD); sol-gel; synchrotron light; thin films; X-ray (Parola chiave)

Incoming links:

Insieme di parole chiave

Deep X-ray Lithography for Direct Patterning of PECVD Films (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)

Membro di

deep X-ray lithography; infrared absorption spectroscopy (IR-AS); lithography; plasma-enhanced chemical vapour deposition (PECVD); sol-gel; synchrotron light; thin films; X-ray (Parola chiave)

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