Parole chiave di "High resolution medium energy ion scattering analysis for the quantitative depth profiling of ultrathin high-k layers"

Label

• Parole chiave di "High resolution medium energy ion scattering analysis for the quantitative depth profiling of ultrathin high-k layers" (literal)
• Keywords of "High resolution medium energy ion scattering analysis for the quantitative depth profiling of ultrathin high-k layers" (literal)

Insieme di parole chiave di

• High resolution medium energy ion scattering analysis for the quantitative depth profiling of ultrathin high-k layers (Articolo in rivista) (Prodotto della ricerca)

Ha membro

• electron microscopy (Parola chiave)
• hafnium compounds (Parola chiave)
• high-k dielectric thin (Parola chiave)
• heat treatment (Parola chiave)
• chemical vapour deposition (Parola chiave)

Incoming links:

Insieme di parole chiave

• High resolution medium energy ion scattering analysis for the quantitative depth profiling of ultrathin high-k layers (Articolo in rivista) (Prodotto della ricerca)

Membro di

• electron microscopy (Parola chiave)
• high-k dielectric thin (Parola chiave)
• heat treatment (Parola chiave)
• chemical vapour deposition (Parola chiave)
• hafnium compounds (Parola chiave)