Parole chiave di "High-resolution strain sensing on steel by Silicon-On-Insulator flexural resonators fabricated with chip-level vacuum packaging"
- Label
- Parole chiave di "High-resolution strain sensing on steel by Silicon-On-Insulator flexural resonators fabricated with chip-level vacuum packaging" (literal)
- Keywords of "High-resolution strain sensing on steel by Silicon-On-Insulator flexural resonators fabricated with chip-level vacuum packaging" (literal)
- Insieme di parole chiave di
- High-resolution strain sensing on steel by Silicon-On-Insulator flexural resonators fabricated with chip-level vacuum packaging (Contributo in atti di convegno) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1301)
- Ha membro
- MEMS (Parola chiave)
- Compressive strain (Parola chiave)
- Fabrication and characterizations (Parola chiave)
- Vacuum packaging (Parola chiave)
- Chip scale packages (Parola chiave)
- Solid-state sensors (Parola chiave)
- Very high resolution (Parola chiave)
- Microsystems (Parola chiave)
- Silicon on insulator (Parola chiave)
- Vacuum (Parola chiave)
- Crystal resonators (Parola chiave)
- Actuators (Parola chiave)
- High sensitivity (Parola chiave)
- SOI technology (Parola chiave)
- Silicon on insulator technology (Parola chiave)
- Strain sensors (Parola chiave)
Incoming links:
- Insieme di parole chiave
- High-resolution strain sensing on steel by Silicon-On-Insulator flexural resonators fabricated with chip-level vacuum packaging (Contributo in atti di convegno) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1301)
- Membro di
- Vacuum (Parola chiave)
- MEMS (Parola chiave)
- Actuators (Parola chiave)
- Strain sensors (Parola chiave)
- Very high resolution (Parola chiave)
- Microsystems (Parola chiave)
- Compressive strain (Parola chiave)
- Silicon on insulator (Parola chiave)
- Crystal resonators (Parola chiave)
- Solid-state sensors (Parola chiave)
- Chip scale packages (Parola chiave)
- Fabrication and characterizations (Parola chiave)
- SOI technology (Parola chiave)
- High sensitivity (Parola chiave)
- Silicon on insulator technology (Parola chiave)
- Vacuum packaging (Parola chiave)
