Parole chiave di "Annealing temperature dependence of the electrically active profiles and surface roughness in multiple Al implanted 4H-SiC"

Label

• Parole chiave di "Annealing temperature dependence of the electrically active profiles and surface roughness in multiple Al implanted 4H-SiC" (literal)
• Keywords of "Annealing temperature dependence of the electrically active profiles and surface roughness in multiple Al implanted 4H-SiC" (literal)

Insieme di parole chiave di

• Annealing temperature dependence of the electrically active profiles and surface roughness in multiple Al implanted 4H-SiC (Articolo in rivista) (Prodotto della ricerca)

Ha membro

• scanning probe microscopy (Parola chiave)
• Al implantation (Parola chiave)
• electrical activation (Parola chiave)

Incoming links:

Insieme di parole chiave

• Annealing temperature dependence of the electrically active profiles and surface roughness in multiple Al implanted 4H-SiC (Articolo in rivista) (Prodotto della ricerca)

Membro di

• scanning probe microscopy (Parola chiave)
• electrical activation (Parola chiave)
• Al implantation (Parola chiave)