Parole chiave di "Epitaxial growth, mechanical and electrical properties of SiC/Si and SiC/poly-Si"
- Label
- Parole chiave di "Epitaxial growth, mechanical and electrical properties of SiC/Si and SiC/poly-Si" (literal)
- Keywords of "Epitaxial growth, mechanical and electrical properties of SiC/Si and SiC/poly-Si" (literal)
- Insieme di parole chiave di
- Epitaxial growth, mechanical and electrical properties of SiC/Si and SiC/poly-Si (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Ha membro
- Stress (Parola chiave)
- Silicon Carbide (SiC) (Parola chiave)
- MEMS (Parola chiave)
- Mechanical Properties (Parola chiave)
Incoming links:
- Insieme di parole chiave
- Epitaxial growth, mechanical and electrical properties of SiC/Si and SiC/poly-Si (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Membro di
- MEMS (Parola chiave)
- Silicon Carbide (SiC) (Parola chiave)
- Stress (Parola chiave)
- Mechanical Properties (Parola chiave)