Keywords of "Effects of the oxygen precursor on the interface between (100) Si and HfO2 films grown by atomic layer deposition"

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  • Keywords of "Effects of the oxygen precursor on the interface between (100) Si and HfO2 films grown by atomic layer deposition" (literal)
  • Parole chiave di "Effects of the oxygen precursor on the interface between (100) Si and HfO2 films grown by atomic layer deposition" (literal)
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