Keywords of "Composition and resistivity changes of reactively sputtered W-Si-N thin films under vacuum annealing"

Label

• Keywords of "Composition and resistivity changes of reactively sputtered W-Si-N thin films under vacuum annealing" (literal)
• Parole chiave di "Composition and resistivity changes of reactively sputtered W-Si-N thin films under vacuum annealing" (literal)

Insieme di parole chiave di

• Composition and resistivity changes of reactively sputtered W-Si-N thin films under vacuum annealing (Articolo in rivista) (Prodotto della ricerca)

Ha membro

• TA (Parola chiave)
• DEPOSITION (Parola chiave)
• W)-SI-N DIFFUSION-BARRIERS (Parola chiave)
• AMORPHOUS (MO (Parola chiave)
• METALLIZATIONS (Parola chiave)

Incoming links:

Insieme di parole chiave

• Composition and resistivity changes of reactively sputtered W-Si-N thin films under vacuum annealing (Articolo in rivista) (Prodotto della ricerca)

Membro di

• DEPOSITION (Parola chiave)
• W)-SI-N DIFFUSION-BARRIERS (Parola chiave)
• AMORPHOUS (MO (Parola chiave)
• TA (Parola chiave)
• METALLIZATIONS (Parola chiave)