Journal of vacuum science & technology. B, Microelectronics and nanometer structures

Label
  • Journal of vacuum science & technology. B, Microelectronics and nanometer structures (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi
Alternative label
  • Journal of vacuum science & technology. (literal)
  • An international journal devoted to microelectronics and nanometer structures. Processing, measurement, and phenomena (literal)
  • Microelectronics and nanometer structures (literal)
  • J. vac. sci. technol., B, Microelectron. nanometer struct. process. meas. phenom. (literal)
  • Journal of vacuum science and technology. (literal)
  • JVST B (literal)
  • B. Online (literal)
  • B, (literal)
  • $i Issues for 2003- have issue PDF table of contents title: $a Journal of vacuum science & technology. (literal)
Language
  • eng (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#issn
  • 1520-8567 (literal)
Preferred label
  • Journal of vacuum science & technology. B, Microelectronics and nanometer structures (literal)
Publisher
  • Published for the American Vacuum Society by the American Institute of Physics Woodbury, N.Y. : USA (literal)

Incoming links:


Rivista
data.CNR.it