Journal of vacuum science & technology. B, Microelectronics and nanometer structures
- Label
- Journal of vacuum science & technology. B, Microelectronics and nanometer structures (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi
- Silicon laterally resonant microcantilevers for absolute pressure measurement with integrated actuation and readout (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Investigation of a nanocrystalline silicon phase embedded in SiOx thin films grown by pulsed laser deposition (Articolo in rivista) (Prodotto della ricerca)
- Analysis of stress and composition of silicon nitride thin films deposited by electron cyclotron resonance plasma-enhanced chemical vapor deposition for microfabrication processes (Articolo in rivista) (Prodotto della ricerca)
- High-resolution complex structures for two-dimensional photonic crystals realized by x-ray diffraction lithography. (Articolo in rivista) (Prodotto della ricerca)
- Silicon resonant microcantilevers for absolute pressure measurement (Articolo in rivista) (Prodotto della ricerca)
- Thermal stability of sio2/cosi2/polysilicon multilayer structures improved by cavity formation (Articolo in rivista) (Prodotto della ricerca)
- Optimization of electron beam induced deposition process for the fabrication of diode-like Pt/SiO2/W devices (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Band bending and adsorption/desorption kinetics on N-polar GaN surfaces (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Mn-induced growth of InAs nanowires (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- High-resolution depth profiling of InxGa1-xAs/GaAs multiple quantum well structures by combination of secondary ion mass spectrometry and x-ray diffraction techniques (Articolo in rivista) (Prodotto della ricerca)
- Assessing the performance of two-dimensional dopant profiling techniques (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- B clustering in amorphous Si (Articolo in rivista) (Prodotto della ricerca)
- Nanocrystal metal-oxide-semiconductor memories obtained by chemical vapor deposition of Si nanocrystals (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Two-dimensional effects on ultralow energy B implants in Si (Articolo in rivista) (Prodotto della ricerca)
- Fabrication of a silicon-vacuum field-emission microdiode with a moving anode (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Structural and electrical investigation of high temperature annealed As-implanted Si crystals (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Simulation of scanning capacitance microscopy measurements on ultranarrow doping profiles in silicon (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Environment influence on Ti diffusion and layer degradation of a SiC/Ni2Si/TiW/Au contact structure (Articolo in rivista) (Prodotto della ricerca)
- Triple crystal diffractometry, X-ray standing wave, and transmission electron microscopy investigation of shallow BF2 implantation in Si (Articolo in rivista) (Prodotto della ricerca)
- Investigation of two-dimensional diffusion of the self-interstitials in crystalline silicon at 800 degrees C and at room temperature (Articolo in rivista) (Prodotto della ricerca)
- III-Nitride growth and characteristics on ferroelectric materials using plasma-assisted MBE (Articolo in rivista) (Prodotto della ricerca)
- Electrochemical fabrication of cobalt and nickel tips for scanning tunneling microscopy (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Fabrication of nickel diffractive phase elements for x-ray microscopy at 8 keV photon energy (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Redistribution and electrical activation of ultralow energy implanted boron in silicon following laser annealing (Articolo in rivista) (Prodotto della ricerca)
- Experimental aspects and modeling for quantitative measurements in scanning capacitance microscopy (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Impact of unintentional and intentional nitridation of the 6H-SiC(0001)[sub Si] substrate on GaN epitaxy (Articolo in rivista) (Prodotto della ricerca)
- Valence band alignment and work function of heteroepitaxial nanocrystals on GaAs(001) (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Nanoscale current transport through Schottky contacts on wide bandgap semiconductors (Articolo in rivista) (Prodotto della ricerca)
- Room temperature migration of boron in crystalline silicon during secondary ion mass spectrometry profiling (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Fluorine incorporation in preamorphized silicon (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Role of low-temperature (200 degrees C) nitridation in the growth of GaN by plasma-assisted molecular-beam epitaxy (Articolo in rivista) (Prodotto della ricerca)
- Investigation of growth mode behavior and surface morphology evolution of metalorganic vapor phase epitaxy grown ZnTe layers on (001) GaAs (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Low-energy electron microscopy/x-ray magnetic circular dichroism photoemission electron microscopy study of epitaxial MnAs on GaAs (Articolo in rivista) (Prodotto della ricerca)
- Controlling interface reactivity and Schottky barrier height in Au/ZnSe(001) junctions (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Ordered array of Ga droplets on GaAs(001) by local anodic oxidation (Articolo in rivista) (Prodotto della ricerca)
- Functionalization and characterization of InAs and InP surfaces with hemin (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Real Time Optical Monitoring of PA-MBE of InN on SiC Substrates (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- High resolution medium energy ion scattering analysis for the quantitative depth profiling of ultrathin high-k layers (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- In situ spectroscopic ellipsometry to monitor surface plasmon resonant group-III metals deposited by molecular beam epitaxy (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Kinetics of gallium adlayer adsorption/desorption on polar and non-polar GaN surfaces (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Dielectric thickness dependence of capacitive behavior in graphene deposited on silicon dioxide (Articolo in rivista) (Prodotto della ricerca)
- \"Large area single photon detectors based on parallel configuration NbN nanowires\" (Articolo in rivista) (Prodotto della ricerca)
- Electrical and structural properties of ultrathin SiON films on Si prepared by plasma nitridation (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- He implantation to control B diffusion in crystalline and preamorphized Si (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Fundamental reactions controlling anion exchange during the synthesis of Sb/As mixed-anion heterojunctions (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Scanning capacitance microscopy: Quantitative carrier profiling down to nanostructures (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Size effects on the electrical activation of low-energy implanted B in Si (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Investigation of two dimensional diffusion of the self-interstitials in crystalline Si at 800 °C and at room temperature (Articolo in rivista) (Prodotto della ricerca)
- Alternative label
- B, (literal)
- Journal of vacuum science and technology. (literal)
- JVST B (literal)
- Journal of vacuum science & technology. (literal)
- J. vac. sci. technol., B, Microelectron. nanometer struct. (literal)
- International journal devoted to microelectronics and nanometer structures : (literal)
- Microelectronics and nanometer structures (literal)
- Language
- eng (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#issn
- 1071-1023 (literal)
- Preferred label
- Journal of vacuum science & technology. B, Microelectronics and nanometer structures (literal)
- Publisher
- Published for the Society by the American Institute of Physics, New York : USA (literal)
Incoming links:
- Rivista
- Room temperature migration of boron in crystalline silicon during secondary ion mass spectrometry profiling (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Fluorine incorporation in preamorphized silicon (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Controlling interface reactivity and Schottky barrier height in Au/ZnSe(001) junctions (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Fundamental reactions controlling anion exchange during the synthesis of Sb/As mixed-anion heterojunctions (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Nanocrystal metal-oxide-semiconductor memories obtained by chemical vapor deposition of Si nanocrystals (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Assessing the performance of two-dimensional dopant profiling techniques (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Environment influence on Ti diffusion and layer degradation of a SiC/Ni2Si/TiW/Au contact structure (Articolo in rivista) (Prodotto della ricerca)
- Investigation of two-dimensional diffusion of the self-interstitials in crystalline silicon at 800 degrees C and at room temperature (Articolo in rivista) (Prodotto della ricerca)
- Simulation of scanning capacitance microscopy measurements on ultranarrow doping profiles in silicon (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- B clustering in amorphous Si (Articolo in rivista) (Prodotto della ricerca)
- Analysis of stress and composition of silicon nitride thin films deposited by electron cyclotron resonance plasma-enhanced chemical vapor deposition for microfabrication processes (Articolo in rivista) (Prodotto della ricerca)
- III-Nitride growth and characteristics on ferroelectric materials using plasma-assisted MBE (Articolo in rivista) (Prodotto della ricerca)
- Impact of unintentional and intentional nitridation of the 6H-SiC(0001)[sub Si] substrate on GaN epitaxy (Articolo in rivista) (Prodotto della ricerca)
- Functionalization and characterization of InAs and InP surfaces with hemin (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Real Time Optical Monitoring of PA-MBE of InN on SiC Substrates (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- In situ spectroscopic ellipsometry to monitor surface plasmon resonant group-III metals deposited by molecular beam epitaxy (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Kinetics of gallium adlayer adsorption/desorption on polar and non-polar GaN surfaces (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Triple crystal diffractometry, X-ray standing wave, and transmission electron microscopy investigation of shallow BF2 implantation in Si (Articolo in rivista) (Prodotto della ricerca)
- Two-dimensional effects on ultralow energy B implants in Si (Articolo in rivista) (Prodotto della ricerca)
- Redistribution and electrical activation of ultralow energy implanted boron in silicon following laser annealing (Articolo in rivista) (Prodotto della ricerca)
- Band bending and adsorption/desorption kinetics on N-polar GaN surfaces (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Thermal stability of sio2/cosi2/polysilicon multilayer structures improved by cavity formation (Articolo in rivista) (Prodotto della ricerca)
- Experimental aspects and modeling for quantitative measurements in scanning capacitance microscopy (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Nanoscale current transport through Schottky contacts on wide bandgap semiconductors (Articolo in rivista) (Prodotto della ricerca)
- Dielectric thickness dependence of capacitive behavior in graphene deposited on silicon dioxide (Articolo in rivista) (Prodotto della ricerca)
- High resolution medium energy ion scattering analysis for the quantitative depth profiling of ultrathin high-k layers (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Electrical and structural properties of ultrathin SiON films on Si prepared by plasma nitridation (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Investigation of a nanocrystalline silicon phase embedded in SiOx thin films grown by pulsed laser deposition (Articolo in rivista) (Prodotto della ricerca)
- He implantation to control B diffusion in crystalline and preamorphized Si (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Scanning capacitance microscopy: Quantitative carrier profiling down to nanostructures (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Size effects on the electrical activation of low-energy implanted B in Si (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Mn-induced growth of InAs nanowires (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Investigation of growth mode behavior and surface morphology evolution of metalorganic vapor phase epitaxy grown ZnTe layers on (001) GaAs (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Fabrication of nickel diffractive phase elements for x-ray microscopy at 8 keV photon energy (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- \"Large area single photon detectors based on parallel configuration NbN nanowires\" (Articolo in rivista) (Prodotto della ricerca)
- Silicon resonant microcantilevers for absolute pressure measurement (Articolo in rivista) (Prodotto della ricerca)
- Fabrication of a silicon-vacuum field-emission microdiode with a moving anode (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Structural and electrical investigation of high temperature annealed As-implanted Si crystals (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Silicon laterally resonant microcantilevers for absolute pressure measurement with integrated actuation and readout (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Electrochemical fabrication of cobalt and nickel tips for scanning tunneling microscopy (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- High-resolution complex structures for two-dimensional photonic crystals realized by x-ray diffraction lithography. (Articolo in rivista) (Prodotto della ricerca)
- Investigation of two dimensional diffusion of the self-interstitials in crystalline Si at 800 °C and at room temperature (Articolo in rivista) (Prodotto della ricerca)
- Role of low-temperature (200 degrees C) nitridation in the growth of GaN by plasma-assisted molecular-beam epitaxy (Articolo in rivista) (Prodotto della ricerca)
- Optimization of electron beam induced deposition process for the fabrication of diode-like Pt/SiO2/W devices (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- High-resolution depth profiling of InxGa1-xAs/GaAs multiple quantum well structures by combination of secondary ion mass spectrometry and x-ray diffraction techniques (Articolo in rivista) (Prodotto della ricerca)
- Low-energy electron microscopy/x-ray magnetic circular dichroism photoemission electron microscopy study of epitaxial MnAs on GaAs (Articolo in rivista) (Prodotto della ricerca)
- Valence band alignment and work function of heteroepitaxial nanocrystals on GaAs(001) (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
- Ordered array of Ga droplets on GaAs(001) by local anodic oxidation (Articolo in rivista) (Prodotto della ricerca)