Journal of micromechanics and microengineering

Label

• Journal of micromechanics and microengineering (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi

• Wideband mechanical response of a high-Q silicon double-paddle oscillator (Articolo in rivista) (Prodotto della ricerca)
• Rigid biodegradable photopolymer structures of high resolution using deep-UV laser photocuring (Articolo in rivista) (Prodotto della ricerca)
• A fully integrated GaAs-based three-axis Hall magnetic sensor exploiting self-positioned strain released structures (Articolo in rivista) (Prodotto della ricerca)
• Tolerance analysis of a micro-optical detection system for on-line monitoring of lubricant oils (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
• Hybrid chemical etching of femtosecond laser irradiated structures for engineered microfluidic devices (Articolo in rivista) (Prodotto della ricerca)
• Focused ion beam fabrication procedures of x-ray micro Fresnel zone plates (Articolo in rivista) (Prodotto della ricerca)
• Sharp beveled tip hollow microneedle arrays fabricated by LIGA and 3D soft lithography with polyvinyl alcohol (Articolo in rivista) (Prodotto della ricerca)
• Fabrication of low loss MOMS resonators for quantum optics experiments (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
• Self-patterning of a polydimethylsiloxane microlens array on functionalized substrates and characterization by digital holography (Articolo in rivista) (Prodotto della ricerca)
• Fabrication and electromechanical actuation of epitaxial SrTiO3 (001) microcantilevers (Articolo in rivista) (Prodotto della ricerca)
• Maskless, fast and highly selective etching of fused silica with gaseous fluorine and gaseous hydrogen fluoride (Articolo in rivista) (Prodotto della ricerca)
• Evaluation of different PDMS interconnection solutions for silicon, Pyrex and COC microfluidic chips (Articolo in rivista) (Prodotto della ricerca)
• Fabrication of fiber-optic broadband ultrasound emitters by micro-opto-mechanical technology (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
• Polymeric mask protection for alternative KOH silicon wet etching (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
• High throughput electron beam lithography on insulating substrates for photonic devices (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)

Alternative label

• J. micromechanics microengineering (literal)

Language

• eng (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#issn

• 0960-1317 (literal)

Preferred label

• Journal of micromechanics and microengineering (literal)

Publisher

• IOP Publishing. Bristol: GBR (literal)

Incoming links:

Rivista

• High throughput electron beam lithography on insulating substrates for photonic devices (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
• Sharp beveled tip hollow microneedle arrays fabricated by LIGA and 3D soft lithography with polyvinyl alcohol (Articolo in rivista) (Prodotto della ricerca)
• Tolerance analysis of a micro-optical detection system for on-line monitoring of lubricant oils (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
• Focused ion beam fabrication procedures of x-ray micro Fresnel zone plates (Articolo in rivista) (Prodotto della ricerca)
• Self-patterning of a polydimethylsiloxane microlens array on functionalized substrates and characterization by digital holography (Articolo in rivista) (Prodotto della ricerca)
• A fully integrated GaAs-based three-axis Hall magnetic sensor exploiting self-positioned strain released structures (Articolo in rivista) (Prodotto della ricerca)
• Polymeric mask protection for alternative KOH silicon wet etching (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
• Wideband mechanical response of a high-Q silicon double-paddle oscillator (Articolo in rivista) (Prodotto della ricerca)
• Evaluation of different PDMS interconnection solutions for silicon, Pyrex and COC microfluidic chips (Articolo in rivista) (Prodotto della ricerca)
• Fabrication of low loss MOMS resonators for quantum optics experiments (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
• Hybrid chemical etching of femtosecond laser irradiated structures for engineered microfluidic devices (Articolo in rivista) (Prodotto della ricerca)
• Fabrication and electromechanical actuation of epitaxial SrTiO3 (001) microcantilevers (Articolo in rivista) (Prodotto della ricerca)
• Rigid biodegradable photopolymer structures of high resolution using deep-UV laser photocuring (Articolo in rivista) (Prodotto della ricerca)
• Fabrication of fiber-optic broadband ultrasound emitters by micro-opto-mechanical technology (Articolo in rivista) (http://www.cnr.it/ontology/cnr/individuo/prodotto/TIPO1101)
• Maskless, fast and highly selective etching of fused silica with gaseous fluorine and gaseous hydrogen fluoride (Articolo in rivista) (Prodotto della ricerca)