Replication of deep x-ray lithography fabricated microstructures through casting of soft material (Articolo in rivista)

Type

• Prodotto della ricerca (Classe)
• Articolo in rivista (Classe)

Label

• Replication of deep x-ray lithography fabricated microstructures through casting of soft material (Articolo in rivista) (literal)

Anno

• 2006-01-01T00:00:00+01:00 (literal)

Alternative label

• Perennes, F; Marmiroli, B; Tormen, M; Matteucci, M; Di Fabrizio, E (2006)
  Replication of deep x-ray lithography fabricated microstructures through casting of soft material
  
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• Perennes, F; Marmiroli, B; Tormen, M; Matteucci, M; Di Fabrizio, E (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume

• 5 (literal)

Note

• ISI Web of Science (WOS) (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• Sincrotrone Trieste, I-34012 Basovizza, Italy; INFM, TASC, I-34012 Basovizza, Italy; Univ Magna Graecia, BIONEM Lab, I-88100 Catanzaro, Italy (literal)

Titolo

• Replication of deep x-ray lithography fabricated microstructures through casting of soft material (literal)

Abstract

• We introduce simple double-casting replication methods for high-aspect-ratio microstructures fabricated by deep x-ray lithography using intermediate molds of soft materials. Two types of soft material are investigated. The ability to fabricate polymethylsiloxane (PDMS) molds with well-type structures with aspect ratios up to 35: 1 is demonstrated for structure densities below 50%, and the reproduction from this mold of pillar-type polymethyl methacrylate (PMMA) structures with aspect ratios of 20: 1 is achieved. Polyvinyl alcohol (PVA), a water soluble polymer, is also tested as a sacrificial intermediate mold and successfully used for the replication of structures with aspect ratios up to 5:1. Double-casting replication methods are described and discussed for their potential improvement. (c) 2006 Society of Photo-Optical Instrumentation Engineers. (literal)

Prodotto di

• Nanofabbricazione (MD.P06.017.001) (Modulo)

Autore CNR

• MASSIMO TORMEN (Unità di personale interno)
• ENZO MARIO DI FABRIZIO (Unità di personale esterno)

Insieme di parole chiave

• Parole chiave di "Replication of deep x-ray lithography fabricated microstructures through casting of soft material" (Insieme di parole chiave)

Incoming links:

Autore CNR di

• MASSIMO TORMEN (Unità di personale interno)
• ENZO MARIO DI FABRIZIO (Unità di personale esterno)

Prodotto

• Nanofabbricazione (MD.P06.017.001) (Modulo)

Insieme di parole chiave di

• Parole chiave di "Replication of deep x-ray lithography fabricated microstructures through casting of soft material" (Insieme di parole chiave)