Design of Band-Pass Micromachined Filters based on fixed-fixed Beam Resonators (Contributo in atti di convegno)

Type
Label
  • Design of Band-Pass Micromachined Filters based on fixed-fixed Beam Resonators (Contributo in atti di convegno) (literal)
Anno
  • 2004-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1109/SMICND.2004.1403062 (literal)
Alternative label
  • Catoni S., Marcelli R., Bartolucci G. (2004)
    Design of Band-Pass Micromachined Filters based on fixed-fixed Beam Resonators
    in 2004 International Semiconductor Conference, IEEE CAS 2004, Sinaia, Romania, 4-6 October 2004
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Catoni S., Marcelli R., Bartolucci G. (literal)
Pagina inizio
  • 509 (literal)
Pagina fine
  • 512 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#titoloVolume
  • Proceedings of the 2004 International Semiconductor Conference, IEEE CAS 2004 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali
  • 4 (literal)
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • CNR-IMM Roma Università di Roma \"Tor Vergata\" (literal)
Titolo
  • Design of Band-Pass Micromachined Filters based on fixed-fixed Beam Resonators (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#isbn
  • 0-7803-8499-7 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autoriVolume
  • AA.VV. (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#curatoriVolume
  • Editors: Dan Dascalu, General Chairman; Adrian Rusu, Technical Program Chair (literal)
Abstract
  • Cascaded, two- and three-stages band-pass filters based on fixed-fixed beam micromechanical resonators have been designed for central frequencies F1=10 MHz and F2=20 MHz. Quality factors Q=500 have been predicted, under vacuum conditions, for a 3-dB bandwidth BW=0.2%. Insertion losses in the order of 1 to 2 dB have been evaluated. (literal)
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