Combined low-temperature thermal annealing with laser dehydrogenation/crystallization process for the fabrication of low-temperature polycrystalline silicon thin film transistors on polymeric substrate (Contributo in atti di convegno)

Type
Label
  • Combined low-temperature thermal annealing with laser dehydrogenation/crystallization process for the fabrication of low-temperature polycrystalline silicon thin film transistors on polymeric substrate (Contributo in atti di convegno) (literal)
Anno
  • 2008-01-01T00:00:00+01:00 (literal)
Alternative label
  • V. Privitera, S. Scalese, A. La Magna, S. Bagiante, A. Pecora, M. Cuscunà, L. Maiolo, A. Minotti, D. Simeone, L. Mariucci and G. Fortunato, L. Caristia, F. Mangano, S. Di Marco, M. Camalleri, S. Ravesi, S. Coffa, M.G. Grimaldi, R. De Bastiani, P. Badalà (2008)
    Combined low-temperature thermal annealing with laser dehydrogenation/crystallization process for the fabrication of low-temperature polycrystalline silicon thin film transistors on polymeric substrate
    in E-MRS 2008 Spring Meeting (May 26- 30, 2008, Strasbourg, France), Strasburgo
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • V. Privitera, S. Scalese, A. La Magna, S. Bagiante, A. Pecora, M. Cuscunà, L. Maiolo, A. Minotti, D. Simeone, L. Mariucci and G. Fortunato, L. Caristia, F. Mangano, S. Di Marco, M. Camalleri, S. Ravesi, S. Coffa, M.G. Grimaldi, R. De Bastiani, P. Badalà (literal)
Note
  • ISI Web of Science (WOS) (literal)
Titolo
  • Combined low-temperature thermal annealing with laser dehydrogenation/crystallization process for the fabrication of low-temperature polycrystalline silicon thin film transistors on polymeric substrate (literal)
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Autore CNR

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