Fast underetching of suspended membranes with TMAH on silicon substrates (Contributo in atti di convegno)

Type
Label
  • Fast underetching of suspended membranes with TMAH on silicon substrates (Contributo in atti di convegno) (literal)
Anno
  • 2004-01-01T00:00:00+01:00 (literal)
Alternative label
  • Mancarella F, Roncaglia A, Cardinali GC, Tamarri F, Passini M (2004)
    Fast underetching of suspended membranes with TMAH on silicon substrates
    in INFMeeting, Genova (Italy)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Mancarella F, Roncaglia A, Cardinali GC, Tamarri F, Passini M (literal)
Titolo
  • Fast underetching of suspended membranes with TMAH on silicon substrates (literal)
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