http://www.cnr.it/ontology/cnr/individuo/prodotto/ID86858
An efficient silicon micromachining technique for thermally-based microsystems (Contributo in atti di convegno)
- Type
- Label
- An efficient silicon micromachining technique for thermally-based microsystems (Contributo in atti di convegno) (literal)
- Anno
- 2005-01-01T00:00:00+01:00 (literal)
- Alternative label
Roncaglia A, Mancarella F, Cardinali GC, Sanmartin M, Pizzochero G, Severi M (2005)
An efficient silicon micromachining technique for thermally-based microsystems
in MMD Meeting, Genova (Italy)
(literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
- Roncaglia A, Mancarella F, Cardinali GC, Sanmartin M, Pizzochero G, Severi M (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
- CNR IMM Bologna, I-40129 Bologna, Italy (literal)
- Titolo
- An efficient silicon micromachining technique for thermally-based microsystems (literal)
- Prodotto di
- Autore CNR
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