Influence of Air Heat Exchange Upon On-Chip Measurement of Thermal Conductivity using MEMS Test Structures (Contributo in atti di convegno)

Type

• Prodotto della ricerca (Classe)
• Contributo in atti di convegno (Classe)

Label

• Influence of Air Heat Exchange Upon On-Chip Measurement of Thermal Conductivity using MEMS Test Structures (Contributo in atti di convegno) (literal)

Anno

• 2007-01-01T00:00:00+01:00 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi

• 10.1109/SENSOR.2007.4300205 (literal)

Alternative label

• Roncaglia A; Cozzani E; Mancarella F; Passini M; Cardinali GC; Severi M (2007)
  Influence of Air Heat Exchange Upon On-Chip Measurement of Thermal Conductivity using MEMS Test Structures
  in International Solid-State Sensors, Actuators and Microsystems Conference, 2007 (TRANSDUCERS 2007 and EUROSENSORSXXI), Lyon (France), 10-14 June 2007
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• Roncaglia A; Cozzani E; Mancarella F; Passini M; Cardinali GC; Severi M (literal)

Pagina inizio

• 615 (literal)

Pagina fine

• 618 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#url

• http://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=4300205&contentType=Conference+Publications&searchField%3DSearch_All%26queryText%3DInfluence+of+Air+Heat+Exchange+Upon+On-Chip+Measurement+of+Thermal+Conductivity+using+MEMS+Test+Structures (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#titoloVolume

• Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. Internationa (literal)

Rivista

• Digest of technical papers (Rivista)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali

• 4 (literal)

Note

• Scopu (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• CNR IMM Bologna (literal)

Titolo

• Influence of Air Heat Exchange Upon On-Chip Measurement of Thermal Conductivity using MEMS Test Structures (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#isbn

• 1-4244-0842-3 (literal)

Abstract

• We propose an experimental and theoretical investigation of the effect of heat exchange through air upon the operation of on-chip test microstructures for heat conductivity measurements on thin films. By comparing measurements performed in vacuum (the usual method applied in most of the literature) and in air, a difference is devised on the determined thermal conductivity values in the two cases, depending on the thermal characteristics of the layer of interest. This discrepancy is interpreted by carefully evaluating the results of thermal simulations of the test structures' operation and explained in terms of a difference in thermal exchange through the gas phase induced by the presence of the measured layer on the test structure. (literal)

Prodotto di

• Studio e sviluppo di microsistemi per analisi chimica (MD.P05.013.001) (Modulo)
• Institute for microelectronics and microsystems (IMM) (Istituto)

Autore CNR

• ALBERTO RONCAGLIA (Persona)
• GIAN CARLO CARDINALI (Unità di personale interno)
• FULVIO MANCARELLA (Unità di personale esterno)
• ENRICO COZZANI (Unità di personale esterno)

Incoming links:

Autore CNR di

• GIAN CARLO CARDINALI (Unità di personale interno)
• ALBERTO RONCAGLIA (Persona)
• FULVIO MANCARELLA (Unità di personale esterno)
• ENRICO COZZANI (Unità di personale esterno)

Prodotto

• Institute for microelectronics and microsystems (IMM) (Istituto)
• Studio e sviluppo di microsistemi per analisi chimica (MD.P05.013.001) (Modulo)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi

• Digest of technical papers (Rivista)