In-depth Investigation of Hf-based High-k Dielectrics as Storage Layer of Charge-Trap NVMs (Contributo in atti di convegno)

Type
Label
  • In-depth Investigation of Hf-based High-k Dielectrics as Storage Layer of Charge-Trap NVMs (Contributo in atti di convegno) (literal)
Anno
  • 2006-01-01T00:00:00+01:00 (literal)
Alternative label
  • Buckley J, Bocquet M, Molas G, Gely M, Brianceau P, Rochat N, Martinez E, Martin F, Grampeix H, Colonna JP, Toffoli A, Vidal V, Leroux C, Ghibaudo G, Pananakakis G, Bongiorno C, Corso D, Lombardo S, De Salvo B, Deleonibus S (2006)
    In-depth Investigation of Hf-based High-k Dielectrics as Storage Layer of Charge-Trap NVMs
    in International Electron Devices Meeting, 2006. IEDM '06, Washington, DC
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Buckley J, Bocquet M, Molas G, Gely M, Brianceau P, Rochat N, Martinez E, Martin F, Grampeix H, Colonna JP, Toffoli A, Vidal V, Leroux C, Ghibaudo G, Pananakakis G, Bongiorno C, Corso D, Lombardo S, De Salvo B, Deleonibus S (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#descrizioneSinteticaDelProdotto
  • In this paper, different Hf-based oxides (HfO2, HfSiO under several annealing conditions, HfSiON, HfAlO with various compositions) are simultaneously considered as storage layers of charge-trap memories. Based on material characterization analyses, electrical data of memory cells, physical modeling of charge-trap devices, we show that a strict relationship exists between the crystal structure of the storage layer and the memory performances. The obtained results clearly demonstrate the high interest of HfO2 dielectric as possible storage layer of future NROM-like memory devices. (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • CEA-LETI; IMM-CNR Catania (literal)
Titolo
  • In-depth Investigation of Hf-based High-k Dielectrics as Storage Layer of Charge-Trap NVMs (literal)
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