Process dependence of doped polysilicon thermal conductivity for thermal MEMS applications (Contributo in atti di convegno)

Type
Label
  • Process dependence of doped polysilicon thermal conductivity for thermal MEMS applications (Contributo in atti di convegno) (literal)
Anno
  • 2006-01-01T00:00:00+01:00 (literal)
Alternative label
  • Mancarella F, Roncaglia A, Cristiani S, Cardinali G.C, Severi M (2006)
    Process dependence of doped polysilicon thermal conductivity for thermal MEMS applications
    in 11th Italian Conference on Sensors and Microsystems (AISEM2006), Lecce (Italy)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Mancarella F, Roncaglia A, Cristiani S, Cardinali G.C, Severi M (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • CNR IMM Bologna, I-40129 Bologna, Italy (literal)
Titolo
  • Process dependence of doped polysilicon thermal conductivity for thermal MEMS applications (literal)
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