Structural modification of laser annealed a-Si1-xCx : H films (Articolo in rivista)

Type
Label
  • Structural modification of laser annealed a-Si1-xCx : H films (Articolo in rivista) (literal)
Anno
  • 2006-01-01T00:00:00+01:00 (literal)
Alternative label
  • Coscia, U; Ambrosone, G; Minarini, C; Parisi, V; Schutzmann, S; Tebano, A (2006)
    Structural modification of laser annealed a-Si1-xCx : H films
    in Applied surface science
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Coscia, U; Ambrosone, G; Minarini, C; Parisi, V; Schutzmann, S; Tebano, A (literal)
Pagina inizio
  • 4493 (literal)
Pagina fine
  • 4496 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 252 (literal)
Rivista
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • Univ Naples Federico II, Dipartimento Sci Fisiche, I-80126 Naples, Italy; Univ Naples Federico II, CNR, INFM Coherentia, I-80126 Naples, Italy; ENEA, Res Ctr Loc Granatello, I-80055 Naples, Italy; Univ Roma La Sapienza, INFM, Dipartimento Med Sperimentale & Patol, Rome, Italy; Univ Roma Tor Vergata, INFM, Dipartimento Sci & Tecnol Chim, Rome, Italy; Univ Roma Tor Vergata, INFM Coherentia, Rome, Italy; Univ Roma Tor Vergata, Dipartimento Sci & Tecnol Fisiche & Energet, Rome, Italy (literal)
Titolo
  • Structural modification of laser annealed a-Si1-xCx : H films (literal)
Abstract
  • Hydrogenated amorphous silicon carbon films, with relatively low hydrogen content and carbon fraction x, C/(C + Si), ranging from 0.20 to 0.57 have been deposited by RF-plasma enhanced chemical vapor deposition (PECVD) for excimer laser annealing experiments. After the laser treatments all the films show structural modifications. It has been obtained that with increasing, x the crystallinity degree of the Si phase decreases, while that of the SiC phase increases and becomes predominant for x = 0.39. In the overstoichiometric samples only the c-SiC phase has been observed. In all the treated samples 3C-SiC crystallites have been detected. (c) 2005 Elsevier B.V. All rights reserved. (literal)
Prodotto di
Autore CNR
Insieme di parole chiave

Incoming links:


Autore CNR di
Prodotto
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi
Insieme di parole chiave di
data.CNR.it