Damage analysis of EUV Mo/Si multilayer coating irradiated by IR femtosecond pulses (Abstract/Poster in atti di convegno)

Type
Label
  • Damage analysis of EUV Mo/Si multilayer coating irradiated by IR femtosecond pulses (Abstract/Poster in atti di convegno) (literal)
Anno
  • 2010-01-01T00:00:00+01:00 (literal)
Alternative label
  • M. Suman(1,2), G. Monaco(1,2), P. Zuppella(1,2), M. G. Pelizzo(2), F. Ferrari(3), M. Lucchini(3), M. Nisoli(3), D. L. Windt(4) and P. Nicolosi(1) (2010)
    Damage analysis of EUV Mo/Si multilayer coating irradiated by IR femtosecond pulses
    in PXRMS’10: 10th International Conference on the Physics of X-Ray Multilayer Structures, Big Sky, Montana, USA
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • M. Suman(1,2), G. Monaco(1,2), P. Zuppella(1,2), M. G. Pelizzo(2), F. Ferrari(3), M. Lucchini(3), M. Nisoli(3), D. L. Windt(4) and P. Nicolosi(1) (literal)
Note
  • Abstract (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • (1)Information Engineering Department, University of Padova, via Gradenigo 6B, Padova, 35131 Italy (2)National Research Council- National Institute for the Physics of the Matter, LUXOR Laboratory, via Gradenigo 6B, Padova, 35131 Italy (3)Ultras-INFM UdR di Milano, Dipartimento di Fisica, Politecnico di Milano, Milano, Italy (4)Reflective X-ray Optics LLC, 1361 Amsterdam Ave., Suite 3B, New York, NY 10027, USA (literal)
Titolo
  • Damage analysis of EUV Mo/Si multilayer coating irradiated by IR femtosecond pulses (literal)
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