Surface acoustic wave devices on AlN/Single-Crystal Diamond for high frequency and high performances operation (Contributo in atti di convegno)

Type

• Prodotto della ricerca (Classe)
• Contributo in atti di convegno (Classe)

Label

• Surface acoustic wave devices on AlN/Single-Crystal Diamond for high frequency and high performances operation (Contributo in atti di convegno) (literal)

Anno

• 2008-01-01T00:00:00+01:00 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi

• 10.1109/ULTSYM.2008.0474 (literal)

Alternative label

• M. Benetti (1), D. Cannatà (1), F. Di Pietrantonio (1), E. Verona (1), S. Almaviva (2), G. Prestopino (2), C. Verona (2), and G. Verona Rinati (2) (2008)
  Surface acoustic wave devices on AlN/Single-Crystal Diamond for high frequency and high performances operation
  in IEEE Ultrasonics Symposium, Beijing (China)
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• M. Benetti (1), D. Cannatà (1), F. Di Pietrantonio (1), E. Verona (1), S. Almaviva (2), G. Prestopino (2), C. Verona (2), and G. Verona Rinati (2) (literal)

Rivista

• Proceedings - IEEE Ultrasonics Symposium (Rivista)

Note

• ISI Web of Science (WOS) (literal)
• Scopu (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• (1) Istituto di Acustica e Sensoristica \"Orso Mario Corbino\", CNR, Rome, Italy (2) Dipartimento di Ingegneria Meccanica, Università di Roma Tor Vergata, Rome, Italy (literal)

Titolo

• Surface acoustic wave devices on AlN/Single-Crystal Diamond for high frequency and high performances operation (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#isbn

• 978-1-4244-2428-3 (literal)

Abstract

• In this paper we present recent results on fabrication of SAW devices on AlN/single-crystal diamond. The AlN thin film was deposited by sputtering technique, optimized to achieve an high degree of orientation value of the c-axis perpendicular to the plate surface (rocking curve FWHM approximate to 3.5 degrees), while the single-crystal diamond was grown by Microwave Plasma Chemical Vapor Deposition (MWPECVD) on High Pressure High Temperature (HPHT) diamond substrate. SAW propagation on the structure has been theoretically investigated and experimentally verified by implementing both delay-lines and 1-port resonators at different normalized AlN thickness (h/lambda). Very good accordance is obtained between evaluated phase velocity dispersion curves and measured values. Frequency responses show low insertion losses and rather high Q factors, respectively, for delay-lines and resonators. Pseudo-SAW modes are also observed and reported. (literal)

Prodotto di

• Institute of Acoustics and Sensors \"Orso Mario Corbino\" (IDASC) (Istituto)
• Micro-dispositivi acusto-elettronici e Sensori di grandezze chimiche e fisiche (SP.P02.008.001) (Modulo)

Autore CNR

• Domenico Cannatà (Unità di personale esterno)
• FABIO DI PIETRANTONIO (Persona)
• ENRICO VERONA (Unità di personale interno)
• MASSIMILIANO BENETTI (Persona)

Insieme di parole chiave

• Keywords of "Surface acoustic wave devices on AlN/Single-Crystal Diamond for high frequency and high performances operation" (Insieme di parole chiave)

Incoming links:

Autore CNR di

• ENRICO VERONA (Unità di personale interno)
• MASSIMILIANO BENETTI (Persona)
• FABIO DI PIETRANTONIO (Persona)
• Domenico Cannatà (Unità di personale esterno)

Prodotto

• Institute of Acoustics and Sensors \"Orso Mario Corbino\" (IDASC) (Istituto)
• Micro-dispositivi acusto-elettronici e Sensori di grandezze chimiche e fisiche (SP.P02.008.001) (Modulo)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi

• Proceedings - IEEE Ultrasonics Symposium (Rivista)

Insieme di parole chiave di

• Keywords of "Surface acoustic wave devices on AlN/Single-Crystal Diamond for high frequency and high performances operation" (Insieme di parole chiave)