http://www.cnr.it/ontology/cnr/individuo/prodotto/ID74517
SAW Sensors on AlN/Diamond/Si Structures (Contributo in atti di convegno)
- Type
- Label
- SAW Sensors on AlN/Diamond/Si Structures (Contributo in atti di convegno) (literal)
- Anno
- 2004-01-01T00:00:00+01:00 (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
- 10.1109/ICSENS.2004.1426277 (literal)
- Alternative label
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
- M. Benetti (1); D. Cannatà (1); A. D'Amico (2); F. Di Pietrantonio (1); A. Macagnano (3); E. Verona (1) (literal)
- Pagina inizio
- Pagina fine
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
- Note
- ISI Web of Science (WOS) (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
- (1) Istituto di Acustica \"Orso Mario Corbino\", CNR, Rome, Italy
(2) Istituto per la Microelettronica e Microsistemi, CNR, Rome, Italy and Dip. Ing. Elettronica, Università Tor Vergata, Rome, Italy
(3) Istituto per la Microelettronica e Microsistemi, CNR, Rome, Italy (literal)
- Titolo
- SAW Sensors on AlN/Diamond/Si Structures (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#isbn
- Abstract
- In this work we present preliminary results on surface
acoustic waves (SAW) chemical sensors based on a new
AlN/Diamond/Si multilayered structure. The high SAW
velocity in diamond, allows to operate at higher
frequencies at moderate inter-digital transducers (IDT)
line-width resolution in order to increase the sensor output
signals, with the aim to increase the sensor sensitivity.
Aluminium Nitride has been chosen as piezoelectric layer
because of its high SAW velocity together with excellent
electrical, mechanical and chemical properties. The SAW
phase velocity in the experimented structure is 10,716m/s
for the Sezawa mode, more than three times that in ST-cut
quartz. Both SAW delay line and 1-port resonator have
been implemented and tested, under the following
propagation conditions: acoustic wavelength ?=8µm,
normalized AlN film thickness h/?=0.225, operation
frequency f#1.35GHz. The thickness of the Diamond layer
(22µm) is such that it can be considered as a semi-infinite
substrate. The two test structures have been coated by
thermal evaporation with a sensible thin (10nm) layer of
Co-tetra-phenyl-porphyrin which allowed to detect small
concentrations of Ethanol and CO.. (literal)
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