Chemical vapour infiltration of nano-structured carbon in porous silicon (Contributo in atti di convegno)

Type
Label
  • Chemical vapour infiltration of nano-structured carbon in porous silicon (Contributo in atti di convegno) (literal)
Anno
  • 2007-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1002/pssc.200674363 (literal)
Alternative label
  • G. Mattei (1); V. Valentini (1); R. Polini (2) (2007)
    Chemical vapour infiltration of nano-structured carbon in porous silicon
    in 14th Applied Surface Analysis Workshop, AOFA 14, Kaiserslautern; Germany, 17-20 September, 2006
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • G. Mattei (1); V. Valentini (1); R. Polini (2) (literal)
Pagina inizio
  • 2049 (literal)
Pagina fine
  • 2053 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#url
  • http://onlinelibrary.wiley.com/doi/10.1002/pssc.200674363/abstract (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 4 (literal)
Rivista
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  • 6 (literal)
Note
  • Scopu (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • (1) C.N.R. Istituto dei Sistemi Complessi, ISC, Sezione di Montelibretti, Area della Ricerca di Roma 1, C.P. 10, 00016 Monterotondo Scalo (Roma), Italy (2) Dipartimento di Scienze e Tecnologie Chimiche, Università di Roma Tor Vergata, Via della Ricerca Scientifica 1, 00133 Roma, Italy (literal)
Titolo
  • Chemical vapour infiltration of nano-structured carbon in porous silicon (literal)
Abstract
  • For the first time the results of the chemical vapor infiltration (CVI) of nanostructured sp2 carbon in meso-porous silicon layers under process conditions normally used to grow diamond films by Hot Filament Chemical Vapour Deposition (HFCVD) are presented. The combined use of micro-Raman spectroscopy and Field Emission Gun Scanning Electron Microscopy (FEG-SEM) clearly demonstrated that disordered graphitic carbon was infiltrated in the PS pores, thus permeating completely the PS layer. Such a nanostructured carbon infiltration provided new properties to the PS material, which are potentially of great relevance for opto-electronics and sensors applications. (literal)
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