Carbon Nanotubes Grown by Catalytic CVD on Silicon Based Substrates for Electronics Applications (Articolo in rivista)

Type

• Prodotto della ricerca (Classe)
• Articolo in rivista (Classe)

Label

• Carbon Nanotubes Grown by Catalytic CVD on Silicon Based Substrates for Electronics Applications (Articolo in rivista) (literal)

Anno

• 2007-01-01T00:00:00+01:00 (literal)

Alternative label

• Rizzoli R., Angelucci R. , Guerri S. , Parisini A. , Veronese G. P., Vinciguerra V. , Bevilacqua M. F. (2007)
  Carbon Nanotubes Grown by Catalytic CVD on Silicon Based Substrates for Electronics Applications
  in Materials science forum; TRANS TECH PUBLICATIONS LTD, LAUBLSRUTISTR 24, CH-8717 STAFA-ZURICH (Svizzera)
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• Rizzoli R., Angelucci R. , Guerri S. , Parisini A. , Veronese G. P., Vinciguerra V. , Bevilacqua M. F. (literal)

Pagina inizio

• 669 (literal)

Pagina fine

• 674 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#altreInformazioni

• Proceeding paper International conference: Thermec '06 Conference, Vancouver (Canada), July 2006 invited talk (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume

• 539 (literal)

Rivista

• Materials science forum (Rivista)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali

• 6 (literal)

Note

• ISI Web of Science (WOS) (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• CNR IMM Bologna Dipartimento di Fisica - Università di Bologna STMicroelectronics Singapore STMicroelectronics Napoli (literal)

Titolo

• Carbon Nanotubes Grown by Catalytic CVD on Silicon Based Substrates for Electronics Applications (literal)

Abstract

• To exploit the impressive electronic, mechanical and thermal properties of Carbon Nanotubes (CNTs) in the nanoelectronics technology, the development of deposition methods enabling the synthesis of well ordered, properly located and reproducible CNTs structures, is strongly recommended. We have been developing catalytic CVD synthesis of CNTs in order to get aligned nanotubes for applications ranging from nuclear particle-position detectors and cold cathode emitters for storage devices, to interconnects, vias and CNT-FETs. In this paper, the significant achievements gained on CVD growth processes for the CNTs deposition are presented. Ni and Fe catalyst nanoparticles have been obtained starting from thin films evaporated on silicon based substrates. The growth of vertically aligned carpets of MWNTs and horizontally aligned SWNTs, having a diameter of about 1 nm and bridging between patterned catalyst islands, has been accomplished. The SEM, TEM, Raman spectroscopy and AFM characterizations are discussed. (literal)

Editore

• TRANS TECH PUBLICATIONS LTD (Editore)

Prodotto di

• Sintesi e caratterizzazione di materiali nanostrutturati a base di C e Si per applicazioni in sensoristica e nanoelettronica (MD.P05.017.001) (Modulo)
• Institute for microelectronics and microsystems (IMM) (Istituto)

Autore CNR

• RITA RIZZOLI (Persona)
• SERGIO GUERRI (Unità di personale interno)
• ANDREA PARISINI (Unità di personale interno)
• Giulio Paolo Veronese (Persona)
• RENATO ANGELUCCI (Persona)

Incoming links:

Autore CNR di

• RITA RIZZOLI (Persona)
• ANDREA PARISINI (Unità di personale interno)
• RENATO ANGELUCCI (Persona)
• Giulio Paolo Veronese (Persona)
• SERGIO GUERRI (Unità di personale interno)

Prodotto

• Institute for microelectronics and microsystems (IMM) (Istituto)
• Sintesi e caratterizzazione di materiali nanostrutturati a base di C e Si per applicazioni in sensoristica e nanoelettronica (MD.P05.017.001) (Modulo)

Editore di

• TRANS TECH PUBLICATIONS LTD (Editore)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi

• Materials science forum (Rivista)