Thin film bulk acoustic resonator gas sensor functionalized with a nanocomposite Langmuir-Blodgett layer of carbon nanotubes (Articolo in rivista)

Type
Label
  • Thin film bulk acoustic resonator gas sensor functionalized with a nanocomposite Langmuir-Blodgett layer of carbon nanotubes (Articolo in rivista) (literal)
Anno
  • 2008-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1109/TED.2008.919283 (literal)
Alternative label
  • M. Penza (1); P. Aversa (1); G. Cassano (1); D. Suriano (1); W. Wlodarski (2); M. Benetti (3); D. Cannatà (3); F. Di Pietrantonio (3); E. Verona (3) (2008)
    Thin film bulk acoustic resonator gas sensor functionalized with a nanocomposite Langmuir-Blodgett layer of carbon nanotubes
    in I.E.E.E. transactions on electron devices
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • M. Penza (1); P. Aversa (1); G. Cassano (1); D. Suriano (1); W. Wlodarski (2); M. Benetti (3); D. Cannatà (3); F. Di Pietrantonio (3); E. Verona (3) (literal)
Pagina inizio
  • 1237 (literal)
Pagina fine
  • 1243 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 55 (literal)
Rivista
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo
  • 5 (literal)
Note
  • Scopu (literal)
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • (1) Department of Physical Technologies and New Materials, Italian National Agency for New Technologies, Energy, and the Environment, Brindisi, Italy (2) Sensor Technology Laboratory, School of Electrical and Computer Engineering, Royal Melbourne Institute of Technology, Melbourne, Australia (3) Istitute of Acoustics \"O. M. Corbino\", National Research Council, Rome, Italy (literal)
Titolo
  • Thin film bulk acoustic resonator gas sensor functionalized with a nanocomposite Langmuir-Blodgett layer of carbon nanotubes (literal)
Abstract
  • Abstract--A thin-film bulk acoustic resonator (TFBAR) based on a vibrating membrane of AlN/Si3N4 has been fabricated onto a silicon substrate and functionally characterized as gas sensor at a resonating frequency of 1.045 GHz. This novel TFBAR-based gas sensor has been functionalized by a sensing nanocomposite layer, prepared by a Langmuir-Blodgett (LB) technique, of single-walled carbon nanotubes (SWCNTs) embedded in a host matrix of organic material of cadmium arachidate. Highperformance gas detection at room temperature of a SWCNTcoated TFBAR sensor has been reported. The sensing device exhibits high sensitivity (e.g., acetone: 12 kHz/ppm; ethylacetate: 17.3 kHz/ppm), fast response (within 2-3 min), slow reversibility (within 1 h), and good repeatability (<= 5% variation) of response toward tested organic vapors of acetone, ethylacetate, and toluene. (literal)
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