http://www.cnr.it/ontology/cnr/individuo/prodotto/ID5409
Structural and piezoelectric properties of pulsed laser deposited ZnO thin films (Articolo in rivista)
- Type
- Label
- Structural and piezoelectric properties of pulsed laser deposited ZnO thin films (Articolo in rivista) (literal)
- Anno
- 2006-01-01T00:00:00+01:00 (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
- 10.1016/j.spmi.2005.08.073 (literal)
- Alternative label
M. Benetti 1, D. Cannatà 1, F. Di Pietrantonio 1, E. Verona 1, P. Verardi 1, N. Scarisoreanu 2, D.Matei 2, G.Dinescu 2, A.Moldovan 2, M. Dinescu 2 (2006)
Structural and piezoelectric properties of pulsed laser deposited ZnO thin films
in Superlattices and microstructures
(literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
- M. Benetti 1, D. Cannatà 1, F. Di Pietrantonio 1, E. Verona 1, P. Verardi 1, N. Scarisoreanu 2, D.Matei 2, G.Dinescu 2, A.Moldovan 2, M. Dinescu 2 (literal)
- Pagina inizio
- Pagina fine
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
- Rivista
- Note
- Scopu (literal)
- ISI Web of Science (WOS) (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
- 1. Istituto di Acustica e Sensoristica \"O. M. Corbino\" CNR
2. National Institute for Laser, Plasma and Radiation Physics, PO Box MG-16 Magurele, RO 077125 Bucharest, Romania (literal)
- Titolo
- Structural and piezoelectric properties of pulsed laser deposited ZnO thin films (literal)
- Abstract
- Zinc oxide thin films were obtained on Pt-coated silicon, r-cut sapphire and MgO substrates
by laser ablation of a Zn target in oxygen reactive atmosphere, the oxygen being supplied either
by a standard gas inlet valve or from a radiofrequency (RF) oxygen plasma. The influence of the
deposition parameters, i.e., laser wavelength (266 nm, 355 nm, 1064 nm), laser fluence (1.520
J/cm2), oxygen pressure (160 Pa), and of RF plasma beam addition on the morphological properties
of zinc oxide films was particularly investigated. Before piezoelectric measurements the obtained
films, with thicknesses in the range 50 nm4 ìm have been characterized by Atomic Force
Microscopy (AFM), X-ray diffraction (XRD), and Transmission Electron Microscopy (TEM). The
acoustic properties of the ZnO layers have been tested by implementing a surface acoustic wave
(SAW) delay line. Frequency domain and time domain measurements have been performed using a
Network Analyzer (HP8753A). Before the realization of the device, theoretical calculations of SAW
propagation along the multilayered structures have been performed using the PC Acoustic Wave
Software, from McGill University (Canada), considering the substrate as semi-infinite. The obtained
results have been correlated with theoretical simulations. (literal)
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