Structural and piezoelectric properties of pulsed laser deposited ZnO thin films (Articolo in rivista)

Type

• Articolo in rivista (Classe)
• Prodotto della ricerca (Classe)

Label

• Structural and piezoelectric properties of pulsed laser deposited ZnO thin films (Articolo in rivista) (literal)

Anno

• 2005-01-01T00:00:00+01:00 (literal)

Alternative label

• M. Benetti, D. Cannatà, F. Di Pietrantonio, E. Verona, P. Verardi, N. Scarisoreanu, D.Matei, G.Dinescu, A.Moldovan, M. Dinescu (2005)
  Structural and piezoelectric properties of pulsed laser deposited ZnO thin films
  in Superlattices and microstructures
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• M. Benetti, D. Cannatà, F. Di Pietrantonio, E. Verona, P. Verardi, N. Scarisoreanu, D.Matei, G.Dinescu, A.Moldovan, M. Dinescu (literal)

Pagina inizio

• 366 (literal)

Pagina fine

• 375 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume

• 39 (literal)

Rivista

• Superlattices and microstructures (Rivista)

Note

• ISI Web of Science (WOS) (literal)

Titolo

• Structural and piezoelectric properties of pulsed laser deposited ZnO thin films (literal)

Abstract

• Zinc oxide thin films were obtained on Pt-coated silicon, r-cut sapphire and MgO substrates by laser ablation of a Zn target in oxygen reactive atmosphere, the oxygen being supplied either by a standard gas inlet valve or from a radiofrequency (RF) oxygen plasma. The influence of the deposition parameters, i.e., laser wavelength (266 nm, 355 nm, 1064 nm), laser fluence (1.5–20 J/cm2), oxygen pressure (1–60 Pa), and of RF plasma beam addition on the morphological properties of zinc oxide films was particularly investigated. Before piezoelectric measurements the obtained films, with thicknesses in the range 50 nm–4 ìm have been characterized by Atomic Force Microscopy (AFM), X-ray diffraction (XRD), and Transmission Electron Microscopy (TEM). The acoustic properties of the ZnO layers have been tested by implementing a surface acoustic wave (SAW) delay line. Frequency domain and time domain measurements have been performed using a Network Analyzer (HP8753A). Before the realization of the device, theoretical calculations of SAW propagation along the multilayered structures have been performed using the PC Acoustic Wave Software, from McGill University (Canada), considering the substrate as semi-infinite. The obtained results have been correlated with theoretical simulations. © 2005 Published by Elsevier Ltd (literal)

Prodotto di

• Institute of Acoustics and Sensors \"Orso Mario Corbino\" (IDASC) (Istituto)
• Sensori e Tecniche Acustiche (SP.P02.005.001) (Modulo)

Autore CNR

• PATRIZIO VERARDI (Persona)
• FABIO DI PIETRANTONIO (Persona)
• Domenico Cannatà (Unità di personale esterno)
• ENRICO VERONA (Unità di personale interno)
• MASSIMILIANO BENETTI (Persona)

Incoming links:

Autore CNR di

• ENRICO VERONA (Unità di personale interno)
• MASSIMILIANO BENETTI (Persona)
• PATRIZIO VERARDI (Persona)
• FABIO DI PIETRANTONIO (Persona)
• Domenico Cannatà (Unità di personale esterno)

Prodotto

• Institute of Acoustics and Sensors \"Orso Mario Corbino\" (IDASC) (Istituto)
• Sensori e Tecniche Acustiche (SP.P02.005.001) (Modulo)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi

• Superlattices and microstructures (Rivista)