Growth and characterization of piezoelectric AlN thin films for diamond-based Surface Acoustic Wave devices (Articolo in rivista)

Type

• Articolo in rivista (Classe)
• Prodotto della ricerca (Classe)

Label

• Growth and characterization of piezoelectric AlN thin films for diamond-based Surface Acoustic Wave devices (Articolo in rivista) (literal)

Anno

• 2006-01-01T00:00:00+01:00 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi

• 10.1016/j.tsf.2005.10.073 (literal)

Alternative label

• M. Benetti (a); D. Cannatà (a); F. Di Pietrantonio (a); E. Verona (a); A. Generosi (b); B. Paci (b); V. Rossi Albertini (b) (2006)
  Growth and characterization of piezoelectric AlN thin films for diamond-based Surface Acoustic Wave devices
  in Thin solid films (Print)
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• M. Benetti (a); D. Cannatà (a); F. Di Pietrantonio (a); E. Verona (a); A. Generosi (b); B. Paci (b); V. Rossi Albertini (b) (literal)

Pagina inizio

• 304 (literal)

Pagina fine

• 308 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume

• 497 (literal)

Rivista

• Thin solid films (Rivista)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo

• 1-2 (literal)

Note

• Scopu (literal)
• ISI Web of Science (WOS) (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• (a) C.N.R. Istituto di Acustica \"O. M. Corbino\", Roma, Italy (b) C.N.R. Istituto di Struttura della Materia, Roma, Italy (literal)

Titolo

• Growth and characterization of piezoelectric AlN thin films for diamond-based Surface Acoustic Wave devices (literal)

Abstract

• We report on the preparation and structural characterization of piezoelectric films of aluminium nitride onto diamond substrates. The samples were fabricated by sequential radio frequency reactive diode sputtering processes, carried out at various temperatures, in a head vacuum system starting from stechiometric targets. The structural characterization of the films was performed by energy dispersive X-ray diffraction analysis. The deposition temperature was found to play a relevant role to obtain highly textured films with the c -axis perpendicular to the substrate surface, as required by surface-acoustic-wave applications. In particular, a minimum substrate temperature of 300 - C was needed in order to obtain any internal order along the c -axis while, increasing the temperature, the AlN <002> orientation becomes preferential. The rocking curve analysis revealed a good crystalline quality of the AlN films whose degree of epitaxy can be well described by a linearly increasing function of the temperature at which the films are grown. (literal)

Prodotto di

• Sensori e Tecniche Acustiche (SP.P02.005.001) (Modulo)
• Institute of Acoustics and Sensors \"Orso Mario Corbino\" (IDASC) (Istituto)

Autore CNR

• MASSIMILIANO BENETTI (Persona)
• ENRICO VERONA (Unità di personale interno)
• Domenico Cannatà (Unità di personale esterno)
• FABIO DI PIETRANTONIO (Persona)
• VALERIO ROSSI ALBERTINI TIRANNI (Unità di personale interno)
• BARBARA PACI (Unità di personale interno)
• AMANDA GENEROSI (Persona)

Insieme di parole chiave

• Keywords of "Growth and characterization of piezoelectric AlN thin films for diamond-based Surface Acoustic Wave devices" (Insieme di parole chiave)

Incoming links:

Autore CNR di

• ENRICO VERONA (Unità di personale interno)
• VALERIO ROSSI ALBERTINI TIRANNI (Unità di personale interno)
• MASSIMILIANO BENETTI (Persona)
• BARBARA PACI (Unità di personale interno)
• FABIO DI PIETRANTONIO (Persona)
• Domenico Cannatà (Unità di personale esterno)
• AMANDA GENEROSI (Persona)

Prodotto

• Institute of Acoustics and Sensors \"Orso Mario Corbino\" (IDASC) (Istituto)
• Sensori e Tecniche Acustiche (SP.P02.005.001) (Modulo)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi

• Thin solid films (Rivista)

Insieme di parole chiave di

• Keywords of "Growth and characterization of piezoelectric AlN thin films for diamond-based Surface Acoustic Wave devices" (Insieme di parole chiave)