Chemistry and formation process of Ga(Al)As oxide during local anodic oxidation nanolithography (Articolo in rivista)

Type
Label
  • Chemistry and formation process of Ga(Al)As oxide during local anodic oxidation nanolithography (Articolo in rivista) (literal)
Anno
  • 2006-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1016/j.susc.2006.01.086 (literal)
Alternative label
  • Lazzarino, M; Mori, G; Sorba, L; Ercolani, D; Biasiol, G; Heun, S; Locatelli, A (2006)
    Chemistry and formation process of Ga(Al)As oxide during local anodic oxidation nanolithography
    in Surface science
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Lazzarino, M; Mori, G; Sorba, L; Ercolani, D; Biasiol, G; Heun, S; Locatelli, A (literal)
Pagina inizio
  • 3739 (literal)
Pagina fine
  • 3743 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 600 (literal)
Rivista
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • CNR Lab, TASC, INFM, I-34012 Trieste, Italy; Univ Trieste, I-34100 Trieste, Italy; Univ Modena, I-41100 Modena, Italy; Sincrotrone Trieste, Elettra, I-34012 Trieste, Italy (literal)
Titolo
  • Chemistry and formation process of Ga(Al)As oxide during local anodic oxidation nanolithography (literal)
Abstract
  • We present our investigation on the early stage of the photon induced desorption of oxide nanostructures grown on GaAs/AlAs/GaAs heterostructures. The oxide structures were fabricated by local anodic oxidation performed by means of an atomic force microscope. We observed that after a first rapid evolution in which a thick layer of heterogeneous material is removed, the oxide composition remains almost constant. These results support our model in which the oxidation process on a layered material resembles a melting process and produces a mixed material whose composition is the average of the initial one. (c) 2006 Elsevier B.V. All rights reserved. (literal)
Prodotto di
Autore CNR
Insieme di parole chiave

Incoming links:


Autore CNR di
Prodotto
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi
Insieme di parole chiave di
data.CNR.it