Surface study of thin film gas sensors on a micro-machined substrate (Articolo in rivista)

Type

• Articolo in rivista (Classe)
• Prodotto della ricerca (Classe)

Label

• Surface study of thin film gas sensors on a micro-machined substrate (Articolo in rivista) (literal)

Anno

• 2002-01-01T00:00:00+01:00 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi

• 10.1016/S0169-4332(01)01034-0 (literal)

Alternative label

• Casaletto M.P., Kaciulis S., Mattogno G., Pandolfi L., Scavia G., Dori L., Nicoletti S., Severi M., Zampolli S. (2002)
  Surface study of thin film gas sensors on a micro-machined substrate
  in Applied surface science
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• Casaletto M.P., Kaciulis S., Mattogno G., Pandolfi L., Scavia G., Dori L., Nicoletti S., Severi M., Zampolli S. (literal)

Pagina inizio

• 39 (literal)

Pagina fine

• 52 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume

• 189 (literal)

Rivista

• Applied surface science (Rivista)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo

• 1-2 (literal)

Note

• ISI Web of Science (WOS) (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• CNR, Inst Mat Chem, I-00016 Monterotondo, RM, Italy CNR, LAMEL Inst, I-40129 Bologna, Italy (literal)

Titolo

• Surface study of thin film gas sensors on a micro-machined substrate (literal)

Abstract

• The miniaturisation of gas sensors and the compatibility of their fabrication process with modern microelectronics technology are very important aspects of gas-sensing development. The reduction of power consumption could minimise not only thermal stresses and device degradation, but also enable to use battery operated sensors and smart sensor arrays. In the present work, variously surface-activated films of tin oxide deposited on a Si micro-machined substrate, which contained a Si3N4 membrane supporting the entire gas-sensing structure, have been investigated. Due to the very small thermal mass of the membrane, these devices can be operated in fast-pulsed temperature powering regime. The results of the measurements of gas sensitivity to aromatic hydrocarbons in fast-pulsed mode are presented and discussed. The gas sensitivity and device reliability are analysed on the basis of these results and the data of surface analysis of the sensors. The surface analysis of the samples has been carried out by using selected-area X-ray photoelectron spectroscopy (SA-XPS), SA-XPS depth profiling with cyclic Ar+ ion sputtering, scanning Auger microscopy (SAM) and scanning tunnelling microscopy (STM). These analytical techniques enable us to investigate the microchemical composition and morphology of the gas-sensing layers, both before and after the gas detecting cycles in real working conditions. (literal)

Prodotto di

• Istituto per lo studio dei materiali nanostrutturati (ISMN) (Istituto)
• Institute for microelectronics and microsystems (IMM) (Istituto)

Autore CNR

• GUIDO SCAVIA (Persona)
• LEONELLO DORI (Unità di personale interno)
• MARIA PIA CASALETTO (Unità di personale interno)
• SERGIO NICOLETTI (Persona)
• STEFANO ZAMPOLLI (Persona)
• LUCA PANDOLFI (Persona)
• SAULIUS KACIULIS (Persona)

Insieme di parole chiave

• Parole chiave di "Surface study of thin film gas sensors on a micro-machined substrate" (Insieme di parole chiave)

Incoming links:

Autore CNR di

• STEFANO ZAMPOLLI (Persona)
• GUIDO SCAVIA (Persona)
• LEONELLO DORI (Unità di personale interno)
• LUCA PANDOLFI (Persona)
• SAULIUS KACIULIS (Persona)
• SERGIO NICOLETTI (Persona)
• MARIA PIA CASALETTO (Unità di personale interno)

Prodotto

• Institute for microelectronics and microsystems (IMM) (Istituto)
• Istituto per lo studio dei materiali nanostrutturati (ISMN) (Istituto)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi

• Applied surface science (Rivista)

Insieme di parole chiave di

• Parole chiave di "Surface study of thin film gas sensors on a micro-machined substrate" (Insieme di parole chiave)