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In situ thermal evolution of B-B pairs in crystalline Si: a spectroscopic high resolution x-ray diffraction study (Articolo in rivista)

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In situ thermal evolution of B-B pairs in crystalline Si: a spectroscopic high resolution x-ray diffraction study (Articolo in rivista) (literal)

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Bisognin, G; De Salvador, D; Napolitani, E; Carnera, A; Bruno, E; Mirabella, S; Piro, AM; Romano, L; Grimaldi, MG (2008)
In situ thermal evolution of B-B pairs in crystalline Si: a spectroscopic high resolution x-ray diffraction study
in Journal of physics. Condensed matter (Print)
(literal)

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Bisognin, G; De Salvador, D; Napolitani, E; Carnera, A; Bruno, E; Mirabella, S; Piro, AM; Romano, L; Grimaldi, MG (literal)

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\"[Bisognin, G.; De Salvador, D.; Napolitani, E.; Carnera, A.] Univ Padua, MATIS CNR INFM, I-35131 Padua, Italy; [Bisognin, G.; De Salvador, D.; Napolitani, E.; Carnera, A.] Univ Padua, Dipartimento Fis, I-35131 Padua, Italy; [Bruno, E.; Mirabella, S.; Piro, A. M.; Romano, L.; Grimaldi, M. G.] Univ Catania, MATIS CNR INFM, I-95123 Catania, Italy; [Bruno, E.; Mirabella, S.; Piro, A. M.; Romano, L.; Grimaldi, M. G.] Univ Catania, Dipartimento Fis Astronomia, I-95123 Catania, Italy (literal)

Titolo

In situ thermal evolution of B-B pairs in crystalline Si: a spectroscopic high resolution x-ray diffraction study (literal)

Abstract

The lattice strain induced by the thermal evolution of B-B pairs formed in a Si1-xBx/Si layer as a consequence of He irradiation has been studied in situ in an N-2 atmosphere, by using a high resolution x-ray diffractometer equipped with a hot stage sample holder. The collection of repeated rocking curves during a linear temperature (T) ramp allowed monitoring of the effects of the B-B pair thermal evolution on the epilayer lattice parameter a (and equally its strain) during the whole of the annealing from room T up to their complete dissolution (883 degrees C). By analysing the evolution of a(T) we extracted detailed information about the kinetics of B-B pair evolution. This allowed us to determine an experimental description of the B-B pair dissolution path in good agreement with recent ab initio calculations. (literal)

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