Micromachined Low Actuation Voltage RF MEMS Capacitive Switches, Technology and Characterization (Articolo in rivista)

Type

• Articolo in rivista (Classe)
• Prodotto della ricerca (Classe)

Label

• Micromachined Low Actuation Voltage RF MEMS Capacitive Switches, Technology and Characterization (Articolo in rivista) (literal)

Anno

• 2004-01-01T00:00:00+01:00 (literal)

Alternative label

• Rangra K.J., Giacomozzi F. ,Margesin B. , Lorenzelli L. , Mulloni V. , Collini C. , Marcelli R. , Soncini G. (2004)
  Micromachined Low Actuation Voltage RF MEMS Capacitive Switches, Technology and Characterization
  in Romanian Journal of Information Science and Technology
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• Rangra K.J., Giacomozzi F. ,Margesin B. , Lorenzelli L. , Mulloni V. , Collini C. , Marcelli R. , Soncini G. (literal)

Pagina inizio

• 337 (literal)

Pagina fine

• 344 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#url

• http://www.imt.ro/romjist/ (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume

• 7 (literal)

Rivista

• Romanian Journal of Information Science and Technology (Rivista)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali

• 8 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo

• 3-4 (literal)

Note

• ISI Web of Science (WOS) (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• CNR-IMM Roma FBK-irst (literal)

Titolo

• Micromachined Low Actuation Voltage RF MEMS Capacitive Switches, Technology and Characterization (literal)

Abstract

• In this paper we report the realization and characterization of low-loss, capacitive RF MEMS switches that utilize folded serpentine spring suspensions with large area actuation electrodes. The surface micromachined switches with 1.7 mm thick electroplated gold beams are implemented in standard 50 ohm CPW configuration. The electromechanical characterization indicates the measured actuation voltages in the range of 8 – 15 volts. The RF measurements of devices give insertion loss of 0.24 dB and isolation better than 21 dB at 20 GHz. (literal)

Prodotto di

• Institute for microelectronics and microsystems (IMM) (Istituto)

Autore CNR

• ROMOLO MARCELLI (Persona)

Insieme di parole chiave

• Keywords of "Micromachined Low Actuation Voltage RF MEMS Capacitive Switches, Technology and Characterization" (Insieme di parole chiave)

Incoming links:

Autore CNR di

• ROMOLO MARCELLI (Persona)

Prodotto

• Institute for microelectronics and microsystems (IMM) (Istituto)
• http://www.cnr.it/ontology/cnr/individuo/modulo/ID2035

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi

• Romanian Journal of Information Science and Technology (Rivista)

Insieme di parole chiave di

• Keywords of "Micromachined Low Actuation Voltage RF MEMS Capacitive Switches, Technology and Characterization" (Insieme di parole chiave)