Design, Technology and Test of Micro-Machined Coplanar Grounded Wave-Guides on Si Substrates (Articolo in rivista)

Type
Label
  • Design, Technology and Test of Micro-Machined Coplanar Grounded Wave-Guides on Si Substrates (Articolo in rivista) (literal)
Anno
  • 2009-01-01T00:00:00+01:00 (literal)
Alternative label
  • Lucibello A, De Angelis G, Proietti E, Marcelli R, Bartolucci G (2009)
    Design, Technology and Test of Micro-Machined Coplanar Grounded Wave-Guides on Si Substrates
    in Romanian Journal of Information Science and Technology; Editura Academiei Române, Bucuresti (Romania)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Lucibello A, De Angelis G, Proietti E, Marcelli R, Bartolucci G (literal)
Pagina inizio
  • 366 (literal)
Pagina fine
  • 375 (literal)
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  • 12 (literal)
Rivista
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • CNR-IMM Roma Università di Roma \"Tor Vergata\" (literal)
Titolo
  • Design, Technology and Test of Micro-Machined Coplanar Grounded Wave-Guides on Si Substrates (literal)
Abstract
  • Coplanar wave-guide grounded lines (CPWG) have been designed, realized by micro-machining of high resistivity silicon wafers and tested up to 40 GHz. Different configurations have been compared between them by changing the dimensions of the micro-machined via-holes used for the ground connection, as well as their number and separation, to get the optimal electrical matching conditions. Wide-band matching and losses as low as 0.1-0.2 dB/mm have been obtained within the 40 GHz range, in agreement with the predicted behavior. (literal)
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