Fabrication at wafer level of miniaturized gas sensors based on SnO(2) nanorods deposited by PECVD and gas sensing characteristics (Articolo in rivista)

Type
Label
  • Fabrication at wafer level of miniaturized gas sensors based on SnO(2) nanorods deposited by PECVD and gas sensing characteristics (Articolo in rivista) (literal)
Anno
  • 2011-01-01T00:00:00+01:00 (literal)
Alternative label
  • Forleo A, Francioso L, Capone S, Casino F, Siciliano P, Tan O K, Hui H (2011)
    Fabrication at wafer level of miniaturized gas sensors based on SnO(2) nanorods deposited by PECVD and gas sensing characteristics
    in Sensors and actuators. B, Chemical (Print); Elsevier B.V., Amsterdam (Belgio)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Forleo A, Francioso L, Capone S, Casino F, Siciliano P, Tan O K, Hui H (literal)
Pagina inizio
  • 283 (literal)
Pagina fine
  • 287 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 154 (literal)
Rivista
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali
  • 5 (literal)
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • 1. CNR Area, IMM CNR Lecce, I-73100 Lecce, Italy 2. Nanyang Technol Univ, Sensors & Actuators Lab, Sch Elect & Elect Engn, Singapore 639798, Singapore (literal)
Titolo
  • Fabrication at wafer level of miniaturized gas sensors based on SnO(2) nanorods deposited by PECVD and gas sensing characteristics (literal)
Abstract
  • SnO(2) nanorods were successfully deposited on 3\" Si/SiO(2) wafers by inductively coupled plasma-enhanced chemical vapour deposition (PECVD) and a wafer-level patterning of nanorods layer for miniaturized solid state gas sensor fabrication were performed. Uniform needle-shaped SnO(2) nanorods in situ grown were obtained under catalyst- and high temperature treatment-free growth condition. These nanorods have an average diameter between 5 and 15 nm and a length of 160-300 nm. The SnO(2)-nanorods based gas sensors were tested towards NH(3) and CH(3)OH and gas sensing tests show remarkable response, showing promising and repeatable results compared with the SnO(2) thin films gas sensors. (literal)
Editore
Prodotto di
Autore CNR

Incoming links:


Autore CNR di
Prodotto
Editore di
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi
data.CNR.it