http://www.cnr.it/ontology/cnr/individuo/prodotto/ID36790
Optical properties of silicon rich oxides (Articolo in rivista)
- Type
- Label
- Optical properties of silicon rich oxides (Articolo in rivista) (literal)
- Anno
- 2011-01-01T00:00:00+01:00 (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
- 10.1002/pssc.201000413 (literal)
- Alternative label
Summonte C, Centurioni E, Canino M, Allegrezza M, Desalvo A, Terrasi A, Mirabella S, Di Stefano MA, Miritello M, Lo Savio R, Simonte F, Agosta R (2011)
Optical properties of silicon rich oxides
in Physica status solidi. C, Current topics in solid state physics (Internet); Wiley-VCH - Weinheim, Wheinheim (Germania)
(literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
- Summonte C, Centurioni E, Canino M, Allegrezza M, Desalvo A, Terrasi A, Mirabella S, Di Stefano MA, Miritello M, Lo Savio R, Simonte F, Agosta R (literal)
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- CNR-IMM, Via Gobetti 101, 40129 Bologna, Italy
Dip. di Fisica e Astronomia, CNR-IMM-Matis, Università di Catania, Via Santa Sofia 64, 95123 Catania, Italy
IMS R and D, STMicroelectronics, Stradale Primosole 50, 95121 Catania, Italy (literal)
- Titolo
- Optical properties of silicon rich oxides (literal)
- Abstract
- Thermally treated silicon rich oxides (SRO) used as starting
material for the fabrication of silicon nanodots represent
the basis of tunable bandgap nanostructured materials
for optoelectronic and photonic applications. The optical
modelization of such materials is of great interest, as
it allows the simulation of reflectance and transmittance
(R&T) spectra, which is a powerful non destructive tool
in the determination of phase modifications (clustering,
precipitation of new phases, crystallization) upon thermal
treatments. In this paper, we study the optical properties
of a variety of as-deposited and furnace annealed SRO
materials. The different phases are treated by means of
the effective medium approximation. Upon annealing at
low temperature, R&T spectra show the precipitation of
amorphous silicon nanoparticles, while the crystallization
occurring at temperatures higher than 1000 °C is also
clearly identified, in agreement with structural results.
The existing literature on the optical properties of the
silicon nanocrystals is reviewed, with attention on the
specificity of the compositional and structural characteristics
of the involved material. (literal)
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