O-3-based atomic layer deposition of hexagonal La2O3 films on Si(100) and Ge(100) substrates (Articolo in rivista)

Type

• Prodotto della ricerca (Classe)
• Articolo in rivista (Classe)

Label

• O-3-based atomic layer deposition of hexagonal La2O3 films on Si(100) and Ge(100) substrates (Articolo in rivista) (literal)

Anno

• 2010-01-01T00:00:00+01:00 (literal)

Alternative label

• Lamagna L, Wiemer C, Perego M, Volkos SN, Baldovino S, Tsoutsou D, Schamm-Chardon S, Coulon PE, Fanciulli M (2010)
  O-3-based atomic layer deposition of hexagonal La2O3 films on Si(100) and Ge(100) substrates
  in Journal of applied physics
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• Lamagna L, Wiemer C, Perego M, Volkos SN, Baldovino S, Tsoutsou D, Schamm-Chardon S, Coulon PE, Fanciulli M (literal)

Pagina inizio

• 084108 (literal)

Pagina fine

• 084108 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume

• 108 (literal)

Rivista

• Journal of applied physics (Rivista)

Note

• ISI Web of Science (WOS) (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• 1. CNR, IMM, Lab MDM, I-20041 Agrate Brianza, MB Italy 2. Univ Milano Bicocca, Dipartimento Sci Mat, I-20126 Milan, Italy 3. Univ Toulouse, CNRS, CEMES, NMat Grp, F-31055 Toulouse, France (literal)

Titolo

• O-3-based atomic layer deposition of hexagonal La2O3 films on Si(100) and Ge(100) substrates (literal)

Abstract

• The hexagonal phase of La2O3 is obtained upon vacuum annealing of hydroxilated La2O3 films grown with atomic layer deposition at 200 degrees C using La((PrCp)-Pr-i)(3) and O-3. A dielectric constant value of 24 +/- 2 and 22 +/- 1 is obtained on Si-based and Ge-based metal-oxide-semiconductor capacitors, respectively. However, the relatively good La2O3 dielectric properties are associated with significant interface reactivity on both semiconductor substrates. This leads to the identification of a minimum critical thickness that limits the scaling down of the equivalent oxide thickness of the stack. These findings are explained by the spontaneous formation of lanthanum silicate and germanate species which takes place during the growth and also upon annealing. Although the ultimate film thickness scalability remains an unsolved concern, the use of an O-3-based process is demonstrated to be a suitable solution to fabricate La2O3 films that can be successfully converted into the high-k hexagonal phase. (literal)

Prodotto di

• Institute for microelectronics and microsystems (IMM) (Istituto)
• MD.P05.007.001 Materiali, processi, e tecniche analitiche per la realizzazione di dispositivi innovativi con funzionalità logiche o di memoria non volatile integrabili su Silicio (MD.P05.007.002) (Modulo)

Autore CNR

• MICHELE PEREGO (Unità di personale interno)
• MARCO FANCIULLI (Unità di personale esterno)
• CLAUDIA WIEMER (Unità di personale interno)

Incoming links:

Autore CNR di

• CLAUDIA WIEMER (Unità di personale interno)
• MICHELE PEREGO (Unità di personale interno)
• MARCO FANCIULLI (Unità di personale esterno)

Prodotto

• Institute for microelectronics and microsystems (IMM) (Istituto)
• MD.P05.007.001 Materiali, processi, e tecniche analitiche per la realizzazione di dispositivi innovativi con funzionalità logiche o di memoria non volatile integrabili su Silicio (MD.P05.007.002) (Modulo)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi

• Journal of applied physics (Rivista)