Electrooptical Modulating Device Based on a CMOS-Compatible alpha-Si:H/alpha-SiCN Multistack Waveguide (Articolo in rivista)

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Label
  • Electrooptical Modulating Device Based on a CMOS-Compatible alpha-Si:H/alpha-SiCN Multistack Waveguide (Articolo in rivista) (literal)
Anno
  • 2010-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1109/JSTQE.2009.2025604 (literal)
Alternative label
  • Rao S, Della Corte FG, Summonte C, Suriano F (2010)
    Electrooptical Modulating Device Based on a CMOS-Compatible alpha-Si:H/alpha-SiCN Multistack Waveguide
    in IEEE journal of selected topics in quantum electronics; IEEE-Institute Of Electrical And Electronics Engineers Inc., Piscataway (Stati Uniti d'America)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Rao S, Della Corte FG, Summonte C, Suriano F (literal)
Pagina inizio
  • 173 (literal)
Pagina fine
  • 178 (literal)
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  • http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=5332293 (literal)
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  • 16 (literal)
Rivista
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  • 6 (literal)
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  • 1 (literal)
Note
  • ISI Web of Science (WOS) (literal)
  • Scopu (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • 1. Mediterranea Univ Reggio Calabria, Dept Informat Sci Math Elect & Transportat, I-89131 Reggio Di Calabria, Italy 2. CNR, Inst Microelect & Microsyst, Unit Bologna, I-40129 Bologna, Italy (literal)
Titolo
  • Electrooptical Modulating Device Based on a CMOS-Compatible alpha-Si:H/alpha-SiCN Multistack Waveguide (literal)
Abstract
  • In this paper, we report results on a field-effect-induced light modulation at lambda = 1.55 mu m in a high-index-contrast waveguide based on a multisilicon-on-insulator platform. The device is realized with the hydrogenated amorphous silicon (alpha-Si:H) technology, and it is suitable for monolithic integration in a CMOS IC. The device exploits the free-carrier optical absorption electrically induced in the semiconductor core waveguide. The amorphous silicon waveguiding layer contains several thin dielectric films of amorphous silicon carbonitride (alpha-SiCN) embedded along its thickness, thus highly enhancing the absorbing action of the modulator held in the ON state. (literal)
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