http://www.cnr.it/ontology/cnr/individuo/prodotto/ID36584
Defects in Ge caused by sub-amorphizing self-implantation: Formation and dissolution (Articolo in rivista)
- Type
- Label
- Defects in Ge caused by sub-amorphizing self-implantation: Formation and dissolution (Articolo in rivista) (literal)
- Anno
- 2010-01-01T00:00:00+01:00 (literal)
- Alternative label
Bisognin G, Vangelista S, Mastromatteo M, Napolitani E, De Salvador D, Carnera A, Berti M, Bruno E, Scapellato G, Terrasi A (2010)
Defects in Ge caused by sub-amorphizing self-implantation: Formation and dissolution
in Thin solid films (Print)
(literal)
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- Bisognin G, Vangelista S, Mastromatteo M, Napolitani E, De Salvador D, Carnera A, Berti M, Bruno E, Scapellato G, Terrasi A (literal)
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- ISI Web of Science (WOS) (literal)
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- 1. Univ Padua, INFM, CNR, MATIS, I-35131 Padua, Italy
2. Univ Padua, Dipartimento Fis, CNISM, Unita Padova, I-35131 Padua, Italy
3. Univ Catania, INFM, CNR, MATIS, I-95123 Catania, Italy
4. Univ Catania, Dipartimento Fis & Astron, I-95123 Catania, Italy (literal)
- Titolo
- Defects in Ge caused by sub-amorphizing self-implantation: Formation and dissolution (literal)
- Abstract
- High Resolution X-Ray Diffraction (HRXRD) was used to study the strain evolution of lattice defects formed in an array of B delta layers grown by Molecular Beam Epitaxy (MBE) and damaged by sub-amorphizing Ge self-implantation The MBE structure was implanted at room temperature (RT) with 840 keV Ge at a dose of 15 x 10(12) Ge/cm(2) First of all, we observed a RT strain reduction of similar to 40% with respect to the strain value found in the just-implanted sample This strain ageing phenomenon saturates in about 5 months Then, the complete defects dissolution was monitored by in-situ HRXRD during isochronal annealings. Three others strain-recovery steps were identified. the last at T=157 degrees C Moreover, Secondary Ion Mass Spectrometry performed after the strain recovery did not detect any B diffusion till T was raised up to 840 degrees C, measuring in this case a B diffusion equal to the equilibrium one. The whole set of data will be discussed and compared with existing literature (literal)
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