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Defect engineering and micromachining of Lithium Niobate by ion implantation (Articolo in rivista)

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Defect engineering and micromachining of Lithium Niobate by ion implantation (Articolo in rivista) (literal)

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Bianconi M; Bentini GG; Chiarini M; De Nicola P; Montanari GB; Nubile A; Sugliani S (2009)
Defect engineering and micromachining of Lithium Niobate by ion implantation
in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (Print); Elsevier, Amsterdam (Paesi Bassi)
(literal)

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Bianconi M; Bentini GG; Chiarini M; De Nicola P; Montanari GB; Nubile A; Sugliani S (literal)

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1. CNR IMM, I-40129 Bologna, Italy 2. Lab MISTER, I-40129 Bologna, Italy 3. Carlo Gavazzi Space SpA, Sede Bologna, I-40129 Bologna, Italy 4. Univ Bologna, Dipartimento DEIS, I-40136 Bologna, Italy (literal)

Titolo

Defect engineering and micromachining of Lithium Niobate by ion implantation (literal)

Abstract

A complete set of semi-empirical equations has been determined to engineer the damage formation in Lithium Niobate (LN) by irradiation with any ion atomic number and energy in the range 0.1-1.0 MeV/amu. Both nuclear and electronic process were taken into account and in particular the complex regime of sub-threshold electronic damage was quantitatively approached. The chemical etching of the processed material in 50 wt% HF at room temperature has been studied and the dependence of the etching rate on the damage concentration has been quantified. Finally, some test processes for surface micromachining of LN were first planned by using the above equations and then experimentally demonstrated. (literal)

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