TiO2 nanowires array fabrication and gas sensing properties (Articolo in rivista)

Type
Label
  • TiO2 nanowires array fabrication and gas sensing properties (Articolo in rivista) (literal)
Anno
  • 2008-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1016/j.snb.2007.07.074 (literal)
Alternative label
  • Francioso L, Taurino AM, Forleo A, Siciliano P (2008)
    TiO2 nanowires array fabrication and gas sensing properties
    in Sensors and actuators. B, Chemical (Print)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Francioso L, Taurino AM, Forleo A, Siciliano P (literal)
Pagina inizio
  • 70 (literal)
Pagina fine
  • 76 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 130 (literal)
Rivista
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • CNR-IMM (literal)
Titolo
  • TiO2 nanowires array fabrication and gas sensing properties (literal)
Abstract
  • A cheap nanofabrication process for titania (TiO2 ) polycrystalline nanowire array for gas sensing applications with lateral size ranging from 90 to 180 nm, and gas sensing characterizations are presented. Alternatively to typical pattern transfer techniques for submicron fabrication, authors focused on a standard 365 nm UV photolithographic process able to fabricate sol-gel nanostructured titania nanowires from a solid thin film. Main aim of present work is the experimental validation of enhanced gas sensing response of nanopatterned metal oxide thin film sensors. Two different kinds of gas sensor with nanopatterned sensitive area have been realized onto silicon substrates and tested towards different EtOH concentrations; experimental tests have been carried out with a contemporary output signals collection from a nanowires-based gas sensor and a second device with solid sensitive film without patterning, in order to validate effects of nanomachining on sensitive material response. (literal)
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