http://www.cnr.it/ontology/cnr/individuo/prodotto/ID36306
Development of ultra-low-power consumption MOX sensors with ppb-level VOC detection capabilities for emerging applications (Articolo in rivista)
- Type
- Label
- Development of ultra-low-power consumption MOX sensors with ppb-level VOC detection capabilities for emerging applications (Articolo in rivista) (literal)
- Anno
- 2008-01-01T00:00:00+01:00 (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
- 10.1016/j.snb.2008.09.002 (literal)
- Alternative label
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
- Elmi I; Zampolli S; Cozzani E; Mancarella F; Cardinali GC (literal)
- Pagina inizio
- Pagina fine
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#url
- http://www.bo.imm.cnr.it (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
- Rivista
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#note
- 10.1016/j.snb.2008.09.002 (literal)
- Note
- Scopu (literal)
- ISI Web of Science (WOS) (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
- CNR-IMM Bologna (literal)
- Titolo
- Development of ultra-low-power consumption MOX sensors with ppb-level VOC detection capabilities for emerging applications (literal)
- Abstract
- This paper deals with the development of state-of-the-art metal oxide semiconductor (MOX) gas sensors
based on ultra-low-power (ULP) consumption micro-machined hotplates and targeted to VOC detection at
ppb-level. A very simple, single metal, front-side silicon bulk micromachining fabrication technologywas
conceived and proposed. Several types of ULP devices, differing in shape and size, have been designed and
fabricated to assess both the most efficient layout geometry and optimal fabrication process parameters.
The ULP hotplates functional behavior was thoroughly investigated, and typical results on measurements
of the hotplate temperature vs. applied power are reported. A very satisfactory value of 8.9mWat 400 æC
can be highlighted, for a device featuring an innovative self-insulated layout between heater and sensing
layer. Transient temperature responses and evaluation of the hotplate thermal time constant were also
carried out. On the center of the suspended hotplate structures a thin film of tin oxide has been deposited
by means of modified rheotaxial growth and thermal oxidation (M-RGTO) process. A very controlled
amount of gold nanoparticles is finally sputtered onto the sensing layer to enhance its response to VOC
by catalytic effect. As expected and confirmed by morphological characterization the tin oxide film is
structured in nanoclusters very uniform in size. Results of functional characterizations towards different
gases under differentworking conditions are reportedand prove the capability of detecting volatile organic
compounds (VOC) down to few parts a per billion (ppb). (literal)
- Prodotto di
- Autore CNR
- Insieme di parole chiave
Incoming links:
- Autore CNR di
- Prodotto
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi
- Insieme di parole chiave di