Ex situ and in situ catalyst deposition for CNT synthesis by RF-magnetron sputtering (Articolo in rivista)

Type

• Articolo in rivista (Classe)
• Prodotto della ricerca (Classe)

Label

• Ex situ and in situ catalyst deposition for CNT synthesis by RF-magnetron sputtering (Articolo in rivista) (literal)

Anno

• 2008-01-01T00:00:00+01:00 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi

• 10.1016/j.physe.2007.09.153 (literal)

Alternative label

• Scalese S; Scuderi V; Simone F; Pennisi A; Privitera V (2008)
  Ex situ and in situ catalyst deposition for CNT synthesis by RF-magnetron sputtering
  in Physica. E, Low-dimensional systems and nanostructures (Print)
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• Scalese S; Scuderi V; Simone F; Pennisi A; Privitera V (literal)

Pagina inizio

• 2243 (literal)

Pagina fine

• 2246 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume

• 40 (literal)

Rivista

• Physica. E, Low-dimensional systems and nanostructures (Rivista)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali

• 4 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroFascicolo

• 7 (literal)

Note

• ISI Web of Science (WOS) (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni

• [Scalese, S.; Scuderi, V.; Pennisi, A.; Privitera, V.] Ist Microelettron & Microsistemi Consiglio Nazl R, I-95121 Catania, Italy; [Scuderi, V.; Simone, F.] Univ Catania, Dipartimento Fis & Astron, I-95125 Catania, Italy (literal)

Titolo

• Ex situ and in situ catalyst deposition for CNT synthesis by RF-magnetron sputtering (literal)

Abstract

• Radio frequency magnetron sputtering has been used for the synthesis of aligned carbon nanotubes (CNTs) on SiO2/Si substrate. The results were obtained by depositing catalytic nano-particles in advance (ex situ) or simultaneously to the C deposition (in situ), which have been compared showing that the oxidation of the metal catalyst deposited in advance is detrimental for the good outcome of the CNTs growth. An in situ catalyst deposition allows to get rid of the contamination problem and to grow aligned CNTs on a substrate, as shown by scanning electron microscopy. Transmission electron microscopy shows that the so-achieved CNTs own a bamboo-like structure and the catalytic Ni nanoparticle is on the tip of the CNTs. Our method allows to perform catalyst deposition and growth of CNT on a SiO2/Si substrate simultaneously and its use can be extended to a variety of catalytic elements and substrates, in principle without many efforts. (C) 2007 Elsevier B.V. All rights reserved. (literal)

Prodotto di

• Sviluppo di metodologie avanzate per dispositivi elettronici micro e nanostrutturati (MD.P05.005.001) (Modulo)
• Institute for microelectronics and microsystems (IMM) (Istituto)
• Materiali nanostrutturati a base di Carbonio (MD.P05.005.005) (Modulo)

Autore CNR

• VITTORIO PRIVITERA (Persona)
• AGOSTINO PENNISI DI FLORISTELLA (Persona)
• Viviana Scuderi (Persona)
• SILVIA SCALESE (Persona)

Insieme di parole chiave

• Keywords of "Ex situ and in situ catalyst deposition for CNT synthesis by RF-magnetron sputtering" (Insieme di parole chiave)

Incoming links:

Autore CNR di

• VITTORIO PRIVITERA (Persona)
• SILVIA SCALESE (Persona)
• Viviana Scuderi (Persona)
• AGOSTINO PENNISI DI FLORISTELLA (Persona)

Prodotto

• Institute for microelectronics and microsystems (IMM) (Istituto)
• Materiali nanostrutturati a base di Carbonio (MD.P05.005.005) (Modulo)
• Sviluppo di metodologie avanzate per dispositivi elettronici micro e nanostrutturati (MD.P05.005.001) (Modulo)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi

• Physica. E, Low-dimensional systems and nanostructures (Rivista)

Insieme di parole chiave di

• Keywords of "Ex situ and in situ catalyst deposition for CNT synthesis by RF-magnetron sputtering" (Insieme di parole chiave)