http://www.cnr.it/ontology/cnr/individuo/prodotto/ID36065
CMOS-compatible fabrication of thermopiles with high sensitivity in the 3-5 µm atmospheric window (Articolo in rivista)
- Type
- Label
- CMOS-compatible fabrication of thermopiles with high sensitivity in the 3-5 µm atmospheric window (Articolo in rivista) (literal)
- Anno
- 2007-01-01T00:00:00+01:00 (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
- 10.1016/j.snb.2007.02.018 (literal)
- Alternative label
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
- Roncaglia A; Mancarella F; Cardinali GC (literal)
- Pagina inizio
- Pagina fine
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#url
- http://www.sciencedirect.com/science/article/pii/S0925400507000998 (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
- Rivista
- Note
- Scopu (literal)
- ISI Web of Science (WOS) (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
- CNR-IMM Bologna Italy (literal)
- Titolo
- CMOS-compatible fabrication of thermopiles with high sensitivity in the 3-5 µm atmospheric window (literal)
- Abstract
- A CMOS-compatible process is proposed for the fabrication of thermopiles with high sensitivity in the 3-5 µm window, suited for use in non-dispersive infrared (NDIR) or photo acoustic (PA) gas sensors. Since CMOS passivation layers present low infrared absorption at those wavelengths, an interferometric absorbing layer based on thin metals with a dielectric spacer is adopted and embedded in the fabrication process. Different CMOS-compatible thermoelement designs are investigated and compared in terms of performance, considering Al/n-polysilicon, Al/p-polysilicon and p-/n-polysilicon solutions. Electrical tests on the fabricated devices indicate a noise equivalent power of about 0.76 nW for 1 mm(2) wide p-/n-polysilicon thermopiles, which makes such devices applicable in NDIR or PA-based sensing of relevant gases like CO, CO2, N2O or CH4 having absorption lines in the 3-5 µm wavelength range. (literal)
- Prodotto di
- Autore CNR
Incoming links:
- Autore CNR di
- Prodotto
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi