CMOS-compatible fabrication of thermopiles with high sensitivity in the 3-5 µm atmospheric window (Articolo in rivista)

Type
Label
  • CMOS-compatible fabrication of thermopiles with high sensitivity in the 3-5 µm atmospheric window (Articolo in rivista) (literal)
Anno
  • 2007-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1016/j.snb.2007.02.018 (literal)
Alternative label
  • Roncaglia A; Mancarella F; Cardinali GC (2007)
    CMOS-compatible fabrication of thermopiles with high sensitivity in the 3-5 µm atmospheric window
    in Sensors and actuators. B, Chemical (Print)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Roncaglia A; Mancarella F; Cardinali GC (literal)
Pagina inizio
  • 214 (literal)
Pagina fine
  • 223 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#url
  • http://www.sciencedirect.com/science/article/pii/S0925400507000998 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 125 (literal)
Rivista
Note
  • Scopu (literal)
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • CNR-IMM Bologna Italy (literal)
Titolo
  • CMOS-compatible fabrication of thermopiles with high sensitivity in the 3-5 µm atmospheric window (literal)
Abstract
  • A CMOS-compatible process is proposed for the fabrication of thermopiles with high sensitivity in the 3-5 µm window, suited for use in non-dispersive infrared (NDIR) or photo acoustic (PA) gas sensors. Since CMOS passivation layers present low infrared absorption at those wavelengths, an interferometric absorbing layer based on thin metals with a dielectric spacer is adopted and embedded in the fabrication process. Different CMOS-compatible thermoelement designs are investigated and compared in terms of performance, considering Al/n-polysilicon, Al/p-polysilicon and p-/n-polysilicon solutions. Electrical tests on the fabricated devices indicate a noise equivalent power of about 0.76 nW for 1 mm(2) wide p-/n-polysilicon thermopiles, which makes such devices applicable in NDIR or PA-based sensing of relevant gases like CO, CO2, N2O or CH4 having absorption lines in the 3-5 µm wavelength range. (literal)
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