Growth of carbon nanotubes by Fe-catalyzed chemical vapor processes on silicon-based substrates (Articolo in rivista)

Type
Label
  • Growth of carbon nanotubes by Fe-catalyzed chemical vapor processes on silicon-based substrates (Articolo in rivista) (literal)
Anno
  • 2007-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1016/j.physe.2006.07.043 (literal)
Alternative label
  • Angelucci R, Rizzoli R, Vinciguerra V, Bevilacqua MF, Guerri S, Corticelli F, Passini M (2007)
    Growth of carbon nanotubes by Fe-catalyzed chemical vapor processes on silicon-based substrates
    in Physica. E, Low-dimensional systems and nanostructures (Print); North Holland Pub. Co., Amsterdam (Paesi Bassi)
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Angelucci R, Rizzoli R, Vinciguerra V, Bevilacqua MF, Guerri S, Corticelli F, Passini M (literal)
Pagina inizio
  • 11 (literal)
Pagina fine
  • 15 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#altreInformazioni
  • Proceeding paper (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 37 (literal)
Rivista
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#pagineTotali
  • 6 (literal)
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • CNR-IMM Bologna, I-40129 Bologna, Italy; STMicroelectronics, Singapore 117684, Singapore; STMicroelectronics, I-80055 Naples, Italy (literal)
Titolo
  • Growth of carbon nanotubes by Fe-catalyzed chemical vapor processes on silicon-based substrates (literal)
Abstract
  • In this paper, a site-selective catalytic chemical vapor deposition synthesis of carbon nanotubes on silicon-based substrates has been developed in order to get horizontally oriented nanotubes for field effect transistors and other electronic devices. Properly micro-fabricated silicon oxide and polysilicon structures have been used as substrates. Iron nanoparticles have been obtained both from a thin Fe film evaporated by e-gun and from iron nitrate solutions accurately dispersed on the substrates. Single-walled nanotubes with diameters as small as 1 nm, bridging polysilicon and silicon dioxide \"pillars\", have been grown. The morphology and structure of CNTs have been characterized by SEM, AFM and Raman spectroscopy. (literal)
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