http://www.cnr.it/ontology/cnr/individuo/prodotto/ID35980
Quantitative electron energy loss spectroscopy of Si nanoclusters embedded in SiOx (Articolo in rivista)
- Type
- Label
- Quantitative electron energy loss spectroscopy of Si nanoclusters embedded in SiOx (Articolo in rivista) (literal)
- Anno
- 2007-01-01T00:00:00+01:00 (literal)
- Alternative label
Nicotra G, Bongiorno C, Caristia L, Coffa S, Spinella C (2007)
Quantitative electron energy loss spectroscopy of Si nanoclusters embedded in SiOx
in Microelectronic engineering
(literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
- Nicotra G, Bongiorno C, Caristia L, Coffa S, Spinella C (literal)
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- ISI Web of Science (WOS) (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
- IMM-CNR Catania;
STMicroelectronics Catania. (literal)
- Titolo
- Quantitative electron energy loss spectroscopy of Si nanoclusters embedded in SiOx (literal)
- Abstract
- We have used a methodology, based on electron energy loss spectroscopy combined with energy filtered images, which allows us to quantify the clustered silicon concentration in annealed sub-stoichiometric silicon oxide layers (SiOx). This information was coupled to the chemical silicon and oxygen concentrations determined from Rutherford backscattering analyses. The silicon agglomeration kinetics was investigated as a function of the gas flows used during the plasma enhanced chemical vapor deposition process. Although the clustered Si concentration and the average cluster radius do not follow a well defined dependence on Si, O, or N concentration, separately, the ratio between the former parameter and the silicon excess concentration decreases monotonically as a function of the nitrogen concentration approaching a saturation value equal to 0.2 for nitrogen concentrations above 10 at.%. (literal)
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