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Temperature dependence of the c-axis drift mobility in 4H-SIC (Articolo in rivista)
- Type
- Label
- Temperature dependence of the c-axis drift mobility in 4H-SIC (Articolo in rivista) (literal)
- Anno
- 2006-01-01T00:00:00+01:00 (literal)
- Alternative label
Galvagno G, Roccaforte F, Ruggiero A, Calcagno L, Zanetti E, Saggio M, Portuese F, La Via F (2006)
Temperature dependence of the c-axis drift mobility in 4H-SIC
in Microelectronic engineering
(literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
- Galvagno G, Roccaforte F, Ruggiero A, Calcagno L, Zanetti E, Saggio M, Portuese F, La Via F (literal)
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- ISI Web of Science (WOS) (literal)
- Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
- CNR, IMM, I-95121 Catania, Italy; Univ Catania, Dept Phys & Astron, I-95121 Catania, Italy; STMicroelectronics, I-95121 Catania, Italy; BIC Sicilia, Epitaxial Technol Ctr, I-95030 Catania, Italy (literal)
- Titolo
- Temperature dependence of the c-axis drift mobility in 4H-SIC (literal)
- Abstract
- The electrical characteristics of 4H-SiC Schottky diodes were performed in the temperature range 80-700 K, in order to determine the temperature dependence of the drift mobility. At room temperature, a value of 724 cm(2)/(V s) was found, which decreased to 48.6 cm(2)/ (V s) at 700 K. In the temperature range 200-700 K, a dependence of the mobility as T-3 was determined, that can be correlated to the presence of material defects. (literal)
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