Miniaturizable Si-based electro-optical modulator working at 1.5 microns (Articolo in rivista)

Type
Label
  • Miniaturizable Si-based electro-optical modulator working at 1.5 microns (Articolo in rivista) (literal)
Anno
  • 2005-01-01T00:00:00+01:00 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#doi
  • 10.1063/1.1928324 (literal)
Alternative label
  • Sciuto A.; Libertino S.; Coffa S.; Coppola G. (2005)
    Miniaturizable Si-based electro-optical modulator working at 1.5 microns
    in Applied physics letters
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Sciuto A.; Libertino S.; Coffa S.; Coppola G. (literal)
Pagina inizio
  • 201115 (literal)
Pagina fine
  • 201115 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • 86 (literal)
Rivista
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • CNR, IMM, Sez Catania, I-95121 Catania, Italy; STMicroelect Catania, I-95121 Catania, Italy; CNR, IMM, Sez Napoli, I-80131 Naples, Italy (literal)
Titolo
  • Miniaturizable Si-based electro-optical modulator working at 1.5 microns (literal)
Abstract
  • Optoelectronic devices are considered the innovative element for the next generation of microelectronic integrated circuits. For this purpose, both active and passive devices-extremely miniaturized-must be implemented. We fabricated and electro-optical Si-based light intensity modulator working at 1.5 mu m using a bipolar mode field-effect transistor integrated within a Si rib waveguide. The principle of operation is the light absorption by a plasma of free carriers that can be opportunely moved inside or outside of the device optical channel by properly changing the control bias. The devices, only 100 mu m long, were fabricated using epitaxial Si wafers and standard clean room processing. The optical characterization at 1.48 mu m in static conditions shows a modulation of similar to 90% while the dynamic electrical characterization provides a switching time of approximate to 10 ns (foreseen modulation frequency of hundreds of MHz). A modulation depth above 25% is observed for modulation frequency up to 300 kHz. (literal)
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