Stress engineering in Si based micro structures using technology computer-aided design (Articolo in rivista)

Type
Label
  • Stress engineering in Si based micro structures using technology computer-aided design (Articolo in rivista) (literal)
Anno
  • 2003-01-01T00:00:00+01:00 (literal)
Alternative label
  • Senez V., Armigliato A., Carlotti G., Carnevale G., Jaouen H., De Wolf I. (2003)
    Stress engineering in Si based micro structures using technology computer-aided design
    in IEICE transactions on electronics
    (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori
  • Senez V., Armigliato A., Carlotti G., Carnevale G., Jaouen H., De Wolf I. (literal)
Pagina inizio
  • 284 (literal)
Pagina fine
  • 294 (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume
  • E86C (literal)
Rivista
Note
  • ISI Web of Science (WOS) (literal)
Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#affiliazioni
  • CNRS, ISEN, UMR 8520, IEMN, F-59652 Villeneuve Dascq, France; CNR, IMM, I-40129 Bologna, Italy; INFM, I-06123 Perugia, Italy; Univ Perugia, Dipartimento Fis, I-06123 Perugia, Italy; STMicroelect, I-20041 Agrate Brianza, Italy; STMicroelect, Cent R&D, F-38921 Crolles, France; IMECvzw, B-3001 Louvain, Belgium (literal)
Titolo
  • Stress engineering in Si based micro structures using technology computer-aided design (literal)
Abstract
  • Nowadays, silicon technologies with feature sizes around 100 nm are used in the microelectronics industry to produce gigabits integrated circuits. The prime part of numerical simulation in their development is now well established. One of the purpose of the numerical analyses is the improvement of the mechanical reliability. We synthetize in this paper various works we have performed on the macroscopical modeling and simulation of stress problems and their effects in silicon technologies. (literal)
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