Atomic scale computer aided design for novel semiconductor devices (Articolo in rivista)

Type

• Articolo in rivista (Classe)
• Prodotto della ricerca (Classe)

Label

• Atomic scale computer aided design for novel semiconductor devices (Articolo in rivista) (literal)

Anno

• 2003-01-01T00:00:00+01:00 (literal)

Alternative label

• La Magna A., Alippi P., Colombo L., Strobel M. (2003)
  Atomic scale computer aided design for novel semiconductor devices
  in Computational materials science
  (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#autori

• La Magna A., Alippi P., Colombo L., Strobel M. (literal)

Pagina inizio

• 10 (literal)

Pagina fine

• 15 (literal)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#numeroVolume

• 27 (literal)

Rivista

• Computational materials science (Rivista)

Note

• ISI Web of Science (WOS) (literal)

Titolo

• Atomic scale computer aided design for novel semiconductor devices (literal)

Abstract

• Conventional simulation tools for microelectronic technological processes will be soon obsolete since the scaling-down of semiconductor devices requires atomic scale design. In this context only the concurrent use of different complementary methodologies can satisfy the demands of accurate and efficient modelling. We have applied a series of approaches to a noteworthy case: the B-type doping of Si. The choice of appropriate methodology depends on the peculiar problem we must address. Statics and migration mechanism are studied by quantum mechanical calculation. These calculations validate semiempirical approaches based on atomic particle-particle potential which are applied to the system evolution simulation. These last methodologies are useful when the kinetic evolution occurring during the processes is characterized by rearrangements in different structural identities. Moreover, using these simulations, we can set the parameters ruling the complex dissolution rates in the models which can be applied to the large system simulation. (literal)

Prodotto di

• Institute for microelectronics and microsystems (IMM) (Istituto)

Autore CNR

• PAOLA ALIPPI (Unità di personale interno)
• ANTONINO LA MAGNA (Unità di personale interno)

Incoming links:

Autore CNR di

• ANTONINO LA MAGNA (Unità di personale interno)
• PAOLA ALIPPI (Unità di personale interno)

Prodotto

• Institute for microelectronics and microsystems (IMM) (Istituto)

Http://www.cnr.it/ontology/cnr/pubblicazioni.owl#rivistaDi

• Computational materials science (Rivista)